Radiation characteristics of a flexible micro-electro-mechanical system antenna on a liquid crystal polymer substrate

Lin, Cong; Xu, Lan; Han, Qing

doi:10.1179/1432891715z.0000000001990

Cited by 1 publication

(2 citation statements)

References 10 publications

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“…At present, some progress has been made in the research of various functional flexible RF MEMS, mainly in flexible RF MEMS switches [ 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 , 57 , 58 , 59 , 60 , 61 , 62 , 63 , 64 , 65 , 66 , 67 , 68 , 69 , 70 , 71 , 72 , 73 , 74 , 75 ], phase shifters [ 76 , 77 , 78 ], reconfigurable antennas [ 78 , 79 , 80 , 81 , 82 , 83 , 84 , 85 , 86 ] and phased array antennas [ 87 , 88 , 89 , 90 ] based on them, in MEMS resonators [ 91 , 92 , 93 , 94 , …”

Section: Flexible Rf Mems With Different Functionsmentioning

confidence: 99%

“…At present, some progress has been made in the research of various functional flexible RF MEMS, mainly in flexible RF MEMS switches , phase shifters [76][77][78], reconfigurable antennas [78][79][80][81][82][83][84][85][86] and phased array antennas [87][88][89][90] based on them, in MEMS resonators [91][92][93][94][95][96][97][98][99][100][101][102][103], frequency selective hyper surfaces [104], etc.…”

Section: Flexible Rf Mems With Different Functionsmentioning

confidence: 99%

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Recent Advances in Flexible RF MEMS

Shi

Shen

2022

Micromachines

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Microelectromechanical systems (MEMS) that are based on flexible substrates are widely used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches, phase shifters, reconfigurable antennas, phased array antennas and resonators, etc. When attempting to accommodate flexible deformation with the movable structures of MEMS, flexible RF MEMS are far more difficult to structurally design and fabricate than rigid MEMS devices or other types of flexible electronics. In this review, we survey flexible RF MEMS with different functions, their flexible film materials and their fabrication process technologies. In addition, a fabrication process for reconfigurable three-dimensional (3D) RF devices based on mechanically guided assembly is introduced. The review is very helpful to understand the overall advances in flexible RF MEMS, and serves the purpose of providing a reference source for innovative researchers working in this field.

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