This work systematically investigates the thermodynamic stability of SiaOb(M)cCd structures derived from polymeric precursors incorporating metal fillers: Ta, Nb, and Hf, at 1200 and 1500°C. Structural characterization of the polymer derived ceramics (PDCs) employs X‐ray diffraction, Fourier transform infrared spectroscopy, and X‐ray photoelectron spectroscopy. Enthalpies of formation relative to crystalline components (metal oxide, silica, silicon carbide, and graphite) are obtained from thermodynamic measurements by high temperature oxide melt solution calorimetry. The enthalpies of formation (∆H°f, comp) of Ta‐1200, Hf‐1200, Nb‐1200, Ta‐1500, Hf‐1500, and Nb‐1500 specimens are −137.82 ± 9.72, −256.31 ± 8.97, −82.80 ± 9.82, −182.80 ± 7.85, −292.54 ± 9.38, −224.98 ± 9.60 kJ/mol, respectively. Overall incorporation of Hf results in most thermodynamically stable structures at all synthesis temperatures. SiaOb(M)cCd specimens employing Nb fillers undergo the most stable structural evolution in this temperature range. The results indicate strong thermodynamic drive for carbothermal reduction of metal oxide domains. Incorporation of Ta provides the greatest stabilization of SiO3C mixed bonding environments. Ultimately, the choice of metal filler influences composition, structural evolution, and thermodynamic stability in PDCs.