Abstract. We present a study on 0.8 MeV neutron-induced defects up to fluences of 10 17 n/cm² in fluorine doped optical fibers by using electron paramagnetic resonance, optical absorption and confocal micro-luminescence techniques. Our results allow to address the microscopic mechanisms leading to the generation of Silica-related point-defects such as E', H(I), POR and NBOH Centers.