The latent tracks in mono-and few-layer molybdenum disulfide (MoS 2 ) induced by 209 Bi ions with energies of 0.45-1.23 GeV were characterized by atomic force microscopy (AFM). The hillock-like latent tracks were observed on the surface of irradiated monolayer MoS 2 . The diameter of the hillock after deconvolution procedure is 15.8 ± 1.7 nm and the height is 1.0 ± 0.3 nm. Hillock-like tracks are induced by energy transfer from energetic 209 Bi ions to electron system of MoS 2 , resulting in the ionization and excitation and then the displacement of target atoms. Since Raman spectroscopy is sensitive to damages induced by swift-heavy ion irradiation, the in-plane E 2g 1 mode (*385 cm -1 ) and the out-of-plane A 1g mode (*408 cm -1 ) of MoS 2 were investigated. With increasing ion fluence, the A 1g peak shifts to higher frequencies, and the intensity ratio between A 1g and E 2g 1 peak increases. Besides, the A 1g peak narrows. The evolution of the structural and vibrational properties of MoS 2 with fluence is discussed. It can be concluded that the blue shift and narrowing of A 1g peak in irradiated MoS 2 is due to the adsorption of oxygen molecules at latent tracks. With decreasing thickness of MoS 2 , the irradiation resistance decreases.