Radiation imaging detectors made by wafer post-processing of CMOS chips

Carballo, V.M. Blanco

doi:10.3990/1.9789036528559

Cited by 5 publications

(9 citation statements)

References 104 publications

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“…InGrid production attempts with other materials have consistently shown that aluminum is easier to work with, because of its good adhesion, ductility and ease of wire bonding. Silver and copper seem viable alternatives [34], but these metals are more prone to corrosion.…”

Section: Status Of the Ingrid Microsystemmentioning

confidence: 99%

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Gridpix - Chip Post-processing

Schmitz¹

2010

Proceedings of VERTEX 2009 (18th Workshop) — PoS(VERTEX 2009)

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InGrid, the technology used to make CMOS-integrated high voltage electrodes for micropattern gaseous detectors is reviewed in this paper. It is presented in the broader context of CMOS wafer post-processing. This processing platform is briefly described, and recent highlights of this manufacturing approach are brought forward. The InGrid technology facilitates research into radiation imaging detectors with fully integrated electronics. VERTEX 2009 (18th workshop)

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Section: Status Of the Ingrid Microsystemmentioning

confidence: 99%

“…The circuit architecture may be chosen similar to pixel detector readout chips developed for the LHC-experiments ATLAS [39] and CMS [40]. The [34]. The top electrode is electroplated copper with an overall thickness of 5 µm.…”

Section: Status Of the Ingrid Microsystemmentioning

confidence: 99%

Gridpix - Chip Post-processing

Schmitz¹

2010

Proceedings of VERTEX 2009 (18th Workshop) — PoS(VERTEX 2009)

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“…First we review the device, the technology to construct it and the way it can be combined with readout elements such as CMOS imaging chips. More details can be found in the theses of Max Chefdeville [37] and Victor Blanco Carballo [67]. ese reports introduce the InGrid detector and present the rst results for electron detection and imaging.…”

Section: Chaptermentioning

confidence: 99%

“…Some reports claim that HBs promote cracks [98] others claim that they provide stress relief and can overcome problems with cracks and adhesion [78]. Recent ndings on SU-8 adhesion properties indicate that Hard-Bake steps can have a strong positive effect on adhesion strength [67].…”

Section: In Uence Of Hard-bake Steps On the Dielectric Strength Of Su-8mentioning

confidence: 99%

“…Blanco Carballo and co-workers. Good references are their theses [37,67] and publications such as [68,69]. ese detectors where initially used for the imaging of ionizing radiation by detection of single, individual free electrons, both for 2D imaging as well as for 3D reconstruction using a Time Projection Chamber (TPC) [37].…”

Section: Integrated Micromegas For Photon Detectionmentioning

confidence: 99%

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Photon imaging using post-processed CMOS chips

Melai¹

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Advances in gaseous photomultipliers

Chechik

Breskin

2008

Nuclear Instruments and Methods in Physics Research Section A:

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We review latest progress in gaseous photomultipliers (GPM) combining solid photocathodes and various types of novel electron multipliers. Cascaded gaseous electron multipliers (GEM) coated with CsI photocathodes can efficiently replace UVsensitive wire chambers for single-photon recording in Cherenkov and other detectors. Other hole-multipliers with patterned electrodes (Micro-Hole and Strip Plates) and improved ion-blocking properties are discussed; these permit reducing considerably photon-and ion-induced secondary effects. Photon detectors with other electron-multiplier techniques are briefly described, among them GPMs based on Micromegas, capillary-plates, Thick-GEMs and resistive Thick GEMs. The two latter techniques, robust and economically produced, are particularly suited for large-area GPM applications, e.g. in RICH. Cascaded hole-multipliers with very high ion-blocking performance permitted the development and the first demonstration of DC-operated visible-sensitive gaseous photomultipliers with bialkali photocathodes and single-photon sensitivity. Recent progress is described in GPMs operated at cryogenic temperatures for rare-event noble-liquid detectors and medical imaging.

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Radiation imaging detectors made by wafer post-processing of CMOS chips

Cited by 5 publications

References 104 publications

Gridpix - Chip Post-processing

Gridpix - Chip Post-processing

Photon imaging using post-processed CMOS chips

Advances in gaseous photomultipliers

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