Radiation‐Induced Reaction of Sulfonamide‐Containing Polymers in the Film State for Color Imaging

Abstract

A polysulfonamide and copolymers consisting of sulfonamides and amides underwent Fries rearrangement and scission, forming amino groups upon EB irradiation. The EB irradiation of these films with a dose of 500 µC · cm−2, followed by the color forming reaction provided the color imaging of line/space patterns with a resolution of 300 nm.magnified image

Photoactive Polyesters Containingo-Nitro Benzyl Ester Functionality for Photodeactivatable Adhesion

“…Several recent literature references cited the development of stimuliresponsive polymers for lithography [7][8][9][10][11], tuning of hydrophobicity [12][13][14], and reversible linkages of block copolymers [15][16][17][18][19][20][21][22]. Long et al recently developed polymers containing photodegradable units and photoreversible adhesives [3,[23][24][25][26][27][28].…”

Electron-Beam-Induced Color Imaging of Acid-Chromic Polymer Films

“…Since the generated aniline groups can be transformed with Ehrlich's reagent into colored aromatic imines, this EB-sensitive polysulfonamide film can be patterned with nanoscale resolution by EBDW and successive color-forming reactions. 26 Herein we report on novel color-forming polymer films for nanoscale imaging by EBDW. The thin poly(methyl methacrylate) (PMMA) films, consisting of acid-chromic dyes and acid generators, were employed for EB-induced color formation as depicted in Scheme 1.…”