To advance the understanding of fundamental physical and chemical
processes occurring in ion bombardment of metals, ion beam
nitridation of aluminium, iron, copper and gold is studied in the
energy range 2–5 keV, at current densities of 1 and 5 μA cm
−2, for each ion energy. The concentration profiles
of nitrogen‐ion‐implanted metals were measured by
x‐ray photoelectron spectroscopy (XPS). The chemical
composition and chemical structure of the implanted metals were also
investigated. Copyright © 1999 John Wiley & Sons, Ltd.