“…In comparison with TiAlN 10,11,29 and TiAlCN 7,9,17 coatings, TiAlCuN and TiAlCuCN coatings demonstrate a more dispersive nanostructure with a lower average crystalline size and a lower average size of growth columns. This effect occurs due to the segregation of copper along crystalline boundaries, as revealed by XRD (Fig.…”
Section: Resultsmentioning
confidence: 97%
“…This fact indicates the replacement of titanium atoms by aluminum atoms with a smaller atomic radius: R Ti = 1.47 Å, R Al = 1.43 Å. 33 The formation of a single-phase structure is usually observed for TiAlN 10,11,29 and TiAlCN 7,9,17 coatings. It follows from this fact that the addition of copper does not change the phase composition of the coating and does not lead to the formation of new phases.…”
Section: Resultsmentioning
confidence: 99%
“…1) equipped with a magnetron sputterer, (Radikal[ ion source, substrate heating system, bias supply to the substrate, and the modular gas ow control complex (MGFCC). 28,29 The vacuum chamber equipped with a nitrogen trap was evacuated using a diffusion steam-oil pump and a forevacuum pump. The vacuum system made it possible to obtain the ultimate residual pressure of 9.0 × 10 −4 Pa.…”
Section: Synthesis Of Nanostructured Tialcun and Tialcucn Coatingsmentioning
confidence: 99%
“…A PMI-51 ionization lamp was used as a sensor. The argon ow rate was controlled by the MGFCC 28,29 using feedback between the output signal of the vacuum gauge and the signal to the argon vibrating leak.…”
Section: Synthesis Of Nanostructured Tialcun and Tialcucn Coatingsmentioning
confidence: 99%
“…This method of control and monitoring of reactive magnetron deposition makes it possible to maintain its nonequilibrium state in a stationary manner, ensuring the uniform distribution of elements over depth, and increase the reproducibility of coating formation in terms of composition and thickness. 28,29 Coating characterization methods…”
Section: Synthesis Of Nanostructured Tialcun and Tialcucn Coatingsmentioning
Cu addition to the coating has effects on crystallite and growth column size refinement in comparison with the TiAlN and TiAlCN analogues due to its segregation along crystalline boundaries, and thus, imparts better mechanical characteristics.
“…In comparison with TiAlN 10,11,29 and TiAlCN 7,9,17 coatings, TiAlCuN and TiAlCuCN coatings demonstrate a more dispersive nanostructure with a lower average crystalline size and a lower average size of growth columns. This effect occurs due to the segregation of copper along crystalline boundaries, as revealed by XRD (Fig.…”
Section: Resultsmentioning
confidence: 97%
“…This fact indicates the replacement of titanium atoms by aluminum atoms with a smaller atomic radius: R Ti = 1.47 Å, R Al = 1.43 Å. 33 The formation of a single-phase structure is usually observed for TiAlN 10,11,29 and TiAlCN 7,9,17 coatings. It follows from this fact that the addition of copper does not change the phase composition of the coating and does not lead to the formation of new phases.…”
Section: Resultsmentioning
confidence: 99%
“…1) equipped with a magnetron sputterer, (Radikal[ ion source, substrate heating system, bias supply to the substrate, and the modular gas ow control complex (MGFCC). 28,29 The vacuum chamber equipped with a nitrogen trap was evacuated using a diffusion steam-oil pump and a forevacuum pump. The vacuum system made it possible to obtain the ultimate residual pressure of 9.0 × 10 −4 Pa.…”
Section: Synthesis Of Nanostructured Tialcun and Tialcucn Coatingsmentioning
confidence: 99%
“…A PMI-51 ionization lamp was used as a sensor. The argon ow rate was controlled by the MGFCC 28,29 using feedback between the output signal of the vacuum gauge and the signal to the argon vibrating leak.…”
Section: Synthesis Of Nanostructured Tialcun and Tialcucn Coatingsmentioning
confidence: 99%
“…This method of control and monitoring of reactive magnetron deposition makes it possible to maintain its nonequilibrium state in a stationary manner, ensuring the uniform distribution of elements over depth, and increase the reproducibility of coating formation in terms of composition and thickness. 28,29 Coating characterization methods…”
Section: Synthesis Of Nanostructured Tialcun and Tialcucn Coatingsmentioning
Cu addition to the coating has effects on crystallite and growth column size refinement in comparison with the TiAlN and TiAlCN analogues due to its segregation along crystalline boundaries, and thus, imparts better mechanical characteristics.
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