Radical high polymerization of di-tert-butyl fumarate and novel synthesis of high molecular weight poly(fumaric acid) from its polymer

Titanium oxide films are barriers to the reactive oxygen etching of photoresists in silicon device fabrication. Medium-sized clusters of Ti oxide-alkoxide have been isolated by Klemperer et al. as intermediates in the formation of sol-gels from Ti tetraalkoxides and water. We report that one of the clusters, Ti11013 (OiPr)ls, reacts with diols in hydrocarbon solvents to form network cluster polymers. These polymers form thin films of Ti-rich material that can be pyrolyzed to the anatase form of TiOa. Chemisorption of these cluster polymers onto the surfaces of poly(vinylbenzy1phosphonic acid) copolymers (Macromolecules 1995,28, 110) gives thin coatings with significant etch resistance.

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“…13 The resist solution was formulated with 10 wt 9% of polymer and 10 wt % (versus polymer) of diphenyliodonium triflate in tetrahydrofuran.…”

Section: Methodsmentioning

confidence: 99%

Titanium cluster polymers as reactive ion etch barriers

Katz¹,

Schilling²,

Stein³

et al. 1995

Chem. Mater.

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“…Hence, contrarily to vinyl ethers, allyl ethers can undergo homopropagation. DEF polymerization is well-documented [40]. Representative ESI mass spectra of homopolymers from allylethers (AHE and AIG) as well as the peak assignment are shown in Figs.…”

Section: Mechanism Of Copolymerizations In Solvent-free Blendsmentioning

confidence: 99%

Photo-initiated copolymerization of allyl and vinyl ethers with dialkyl fumarates: A mechanistic investigation by ESI mass spectrometry

Pichavant

Guillermain

Harakat

et al. 2016

European Polymer Journal

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“…2,19 Methyl methacrylate (MMA) and styrene (St) are commercial products from Aldrich Co. and were purified according to standard procedures before use.…”

Section: Monomers and Polymersmentioning

confidence: 99%

“…Dialkyl fumarates with bulky substituents have been shown by Otsu and coworkers 2,3 to polymerize to high molecular weight polymers with many potential uses, e.g., for optical applications and as membranes in gas separation. 4 The copolymerization behavior of the dialkyl fumarate has been investigated in order to see the effect of substitution on the activity of the fumarates [5][6][7][8][9] as well as to study the role of charge transfer constant in the copolymerization process.…”

Section: Introductionmentioning

confidence: 99%