New plasma sources to clean optical mirrors in diagnostic instruments of the ITER experiment consider radiofrequency (RF) discharges operating at low pressures (1-10 Pa) in inert gases. There are near twenty optical diagnostics where the front-end optical mirrors may require plasma cleaning. The mirrors vary in size and would need up to 400 W in the discharge to form ion fluxes capable of removing Be- and W-containing contaminants to restore the optical performance. The plasma sources suggested to clean contaminants include a vacuum matching circuit placed close to the mirror and a quarter wavelength band stop notch filter introducing mirror water cooling. Long-term operation stability and cleaning homogeneity may employ a frequency variation and a phase shift techniques. Plasma sources based on 40 MHz discharge to clean first mirrors are studied experimentally for ITER optical instruments: the Edge Thomson Scattering and the Visible Spectroscopy Reference System.