2015
DOI: 10.1063/1.4922848
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Radio frequency sheaths in an oblique magnetic field

Abstract: The physics of radio-frequency (rf) sheaths near a conducting surface is studied for plasmas immersed in a magnetic field that makes an oblique angle with the surface. A set of one-dimensional equations is developed that describe the dynamics of the time-dependent magnetic presheath and non-neutral Debye sheath. The model employs Maxwell-Boltzmann electrons, and the magnetization and mobility of the ions is determined by the magnetic field strength, and wave frequency, respectively. The angle , assumed to b… Show more

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Cited by 45 publications
(67 citation statements)
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“…[7], can also be incorporated into the model, and future code development efforts to incorporate such models in VSim are envisioned.…”
Section: Fdtd Methods For Em Waves In Plasmamentioning
confidence: 99%
“…[7], can also be incorporated into the model, and future code development efforts to incorporate such models in VSim are envisioned.…”
Section: Fdtd Methods For Em Waves In Plasmamentioning
confidence: 99%
“…Since their first formulation, SBCs have been improved using more basic models of spatially-resolved magnetized RF sheaths over scales much smaller than antenna dimensions [6], [7]. The structure of SSWICH is modular and can incorporate these improvements progressively.…”
Section: Rf and DC Sheath Boundary Conditionsmentioning
confidence: 99%
“…Thus, Eq. (1) expresses a complex linear relationship between V 1 and I, which we apply to the nonlinear rf sheath to obtain an effective impedance at the driving rf frequency This is done by projecting the inphase and out-of-phase components of the current [3]. To do this, we write…”
Section: Introductionmentioning
confidence: 99%
“…For E t we have ) Jz ( V V t 1 t sh t t E and J = J n = i D n /(4 ). (The sign change between V sh and V 1 is explained in [3]). From these expressions we have the final result, to be employed as the new rf sheath BC in rf wave and antenna codes:…”
Section: Introductionmentioning
confidence: 99%
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