“…7,9,11,17,26,31,41 The nitrogen content can be increased by raising the reaction temperature and ammonia flow rate, 31 but this method is hazardous because of NH 3 . In addition to these methods, alternative techniques including atomic deposition, 8,13,42 physical vapor deposition, 20 laser deposition, 17,43,44 and anhydrous sol-gel methods 32 have also been employed to synthesize TiO x N y oxynitrides. Titaniumcontaining precursors such as TiCl 4 , 8,27,30 Ti(OH) 4 , 32 and Ti (SO 4 ) 2 28 have been used with nitrogen sources such as nitrogen, 43 ammonia, 12,25,27,45 and urea 32 for synthesizing TiO x N y oxynitrides.…”