Radius of Curvature Measurement Using Piezoelectric Micromachined Ultrasonic Transducers

Pala, Sedat; Liang, Yue; Eovino, Benjamin E.; Shao, Zhichun; Lin, Liwei

doi:10.1109/mems46641.2020.9056288

Cited by 8 publications

(1 citation statement)

References 11 publications

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“…Micromachined ultrasonic transducers (MUTs) are best known for their capability to provide medical diagnostics in the form of ultrasonic images [1] in human body or liquid [2]. In recent years, MUT applications have been expanded in the air medium such as range finders [3][4][5], fingerprint sensing [6,7], human machine interface [8,9], gesture recognition [10], surface metrology [11,12], and more. There are two transduction mechanisms in MUTs: the capacitive [13] and piezoelectric scheme [14].…”

Section: Introductionmentioning

confidence: 99%

An Improved Lumped Element Model for Circular-Shape pMUTs

Pala

Lin

2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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This paper presents an improved lumped element model for clamped, circular-shape, piezoelectric micromachined ultrasonic transducers (pMUTs). A small signal equivalent circuit is developed to include electrical, mechanical, and acoustic domains, which are analyzed separately and combined with the associated couplings. For the first time, a two-term mode shape approach is adapted to reveal intrinsic and extrinsic properties of a pMUT, such as equivalent circuit parameters, input impedance, velocity, displacement, bandwidth, quality factor, directivity, and the on-axis pressure in the near and far field. These properties are compared with prior reports in the literature and exact solutions, as well as Finite Element Method (FEM) simulations. The errors relative to exact solution for all these properties are below 0.5%. These improvements in error are from 5x to about 3 orders of magnitude better than those of prior works. As such, the improved model could be helpful in design and simulation tools for pMUTs.

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Section: Introductionmentioning

confidence: 99%

An Improved Lumped Element Model for Circular-Shape pMUTs

Pala

Lin

2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging

Sun

Wang

Yuan

et al. 2022

Nanotechnology and Precision Engineering

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This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer (PMUT) for detection and imaging of surface stains. A 508 kHz PMUT array is designed, fabricated, and characterized in terms of its electrical and acoustic properties, and it is used in a pulse echo validation test. Imaging of stains on metal blocks is successfully demonstrated. Compared with existing optical methods for stain detection, the proposed approach can work in a dark environment without color requirements. This work provides a new and promising route for the development of miniaturized stain detection systems.

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