2022
DOI: 10.1109/tasc.2022.3167929
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Rail Magnet Arrangements for Improved Stability of a Superconducting Transport System

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Cited by 2 publications
(1 citation statement)
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“…One state-of-the-art example of precision motion systems includes a photolithography machine [2] for the manufacturing of integrated circuits (ICs), where sub-nanometer positioning accuracy and very high speed is required. Similarly, IC inspection and packaging systems, scanning probe microscopes [3], additive manufacturing systems [4], [5], inclean-room transportation system [6], stages for ultraprecision optical payloads [7] and precision machine tools are some other applications of precision positioning systems. Hence, the productivity and quality of the process is influenced by the motion accuracy of the maglev positioning system, and the attenuation of micro-vibrations transmitted from several disturbance sources.…”
Section: Introductionmentioning
confidence: 99%
“…One state-of-the-art example of precision motion systems includes a photolithography machine [2] for the manufacturing of integrated circuits (ICs), where sub-nanometer positioning accuracy and very high speed is required. Similarly, IC inspection and packaging systems, scanning probe microscopes [3], additive manufacturing systems [4], [5], inclean-room transportation system [6], stages for ultraprecision optical payloads [7] and precision machine tools are some other applications of precision positioning systems. Hence, the productivity and quality of the process is influenced by the motion accuracy of the maglev positioning system, and the attenuation of micro-vibrations transmitted from several disturbance sources.…”
Section: Introductionmentioning
confidence: 99%