2010
DOI: 10.1039/b918834g
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Rapid, cost-efficient fabrication of microfluidic reactors in thermoplastic polymers by combining photolithography and hot embossing

Abstract: We report a cost-efficient and easy to implement process for fabricating microfluidic reactors in thermoplastic materials. The method includes (i) the fabrication of an imprint template (master), which consists of a photoresist deposited on a metal plate; (ii) the thermoembossing of the reactor features into polymer sheets; (iii) the activation of the embossed and planar thermoplastic surfaces; and (iv) the low-temperature bonding of these surfaces. The generality of the method is established by fabricating mi… Show more

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Cited by 90 publications
(67 citation statements)
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“…Based on the lower pressure and temperature used, silicon, copper, nickel, stainless steel, and even polymer masters have been used as template material [85,86]. Among them, SU-8 photoresist has also been used as a master material through standard photolithography for embossing polymeric materials under conditions similar to the ones used with metal templates, and an aluminum coating can be applied to facilitate substrate demolding from the template [87]. To fabricate high aspect ratio structures, an [80] anodic aluminum oxidation nanostructured membrane and cylindrical pillars can be used [88,89].…”
Section: Hot Embossingmentioning
confidence: 99%
“…Based on the lower pressure and temperature used, silicon, copper, nickel, stainless steel, and even polymer masters have been used as template material [85,86]. Among them, SU-8 photoresist has also been used as a master material through standard photolithography for embossing polymeric materials under conditions similar to the ones used with metal templates, and an aluminum coating can be applied to facilitate substrate demolding from the template [87]. To fabricate high aspect ratio structures, an [80] anodic aluminum oxidation nanostructured membrane and cylindrical pillars can be used [88,89].…”
Section: Hot Embossingmentioning
confidence: 99%
“…[ 58 ] Photolithography was used to produce polymer hot embossing masters and stamp thermoplastic polymers chips. [ 59 ] Rapid microfl uidic chip prototypes are produced with maskless photolithography using a liquid crystal display projector to pattern photoresist [ 60 ] and direct lithographic patterning of photoresist using a collimated and focused ultraviolet light emitting diode. [ 61 ] Cleanroom environments for microfabrication are not always available.…”
Section: Progress Reportmentioning
confidence: 99%
“…The first two methods are costly and time consuming to implement and laser ablation is limited by the complexity that can be integrated into potential designs [16,17]. Using photolithography to fabricate larger scale devices would only incur higher costs, and would be technically impractical for creating millimetre dimensions.…”
Section: Introductionmentioning
confidence: 99%