2002
DOI: 10.1016/s0022-3093(01)01109-7
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Rapid crystallization of silicon films using pulsed current-induced joule heating

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Cited by 4 publications
(5 citation statements)
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“…Joule-heating by supplying a current to wire is known to be an effective method for the heat treatment of thin wire [13][14][15][16][17][18][19]. Because copper has a small heat capacity (0.385 J/g o C), the temperature of small-scale copper wire can be easily increased by passing a current [20].…”
Section: Introductionmentioning
confidence: 99%
“…Joule-heating by supplying a current to wire is known to be an effective method for the heat treatment of thin wire [13][14][15][16][17][18][19]. Because copper has a small heat capacity (0.385 J/g o C), the temperature of small-scale copper wire can be easily increased by passing a current [20].…”
Section: Introductionmentioning
confidence: 99%
“…The application of electric field to silicon semiconductors materials is used to modify the melt convection mode in the Czochralski growth configuration [1][2][3] and to control the structures at the surface of the crystal. [4][5][6] Watanabe et al 3) developed a new crystal growth technique which uses electromagnetic force to obtain large-diameter, high-quality silicon crystals containing homogeneously distributed oxygen in the concentration required for ULSI device processing. Sameshima and Ozaki 5) reported a crystallization method which involves pulsed-electrical current-induced heating of silicon films in order to fabricate large crystalline grains.…”
Section: Introductionmentioning
confidence: 99%
“…12,13) The heat treatment of micro-and nanomaterials, which have a unique crystalline structure compared with their bulk counterparts, has been performed, and changes in the crystalline structure and physical properties of these materials due to the heat treatment have been investigated. For the heat treatment of thin wires, in particular, it has been verified by experiment [3][4][5][6][7][8] and simulation 9) that inducing Joule heating by supplying a current to the wire is an effective method. Joule heating has also been used to join small-scale materials, e.g., carbon nanotubes 14,15) and micro=nanowires, [16][17][18] together.…”
mentioning
confidence: 97%
“…T he crystalline structure of polycrystalline metals can be modified by applying heat [1][2][3][4][5][6][7][8][9][10][11] or force. 12,13) The heat treatment of micro-and nanomaterials, which have a unique crystalline structure compared with their bulk counterparts, has been performed, and changes in the crystalline structure and physical properties of these materials due to the heat treatment have been investigated.…”
mentioning
confidence: 99%
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