2018
DOI: 10.1007/s10404-018-2167-9
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Rapid detection of ultra-trace nanoparticles based on ACEK enrichment for semiconductor manufacturing quality control

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Cited by 15 publications
(11 citation statements)
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“…As a result, there will not be sufficient DEP force on Cu 2+ when the ions are not close enough to the electrode surface, where |E2falserms|2 is relatively higher. Hence, although DEP force exists very near the surface edges according to previous investigation , it is not the dominant cause of ion adsorption in this work.…”
Section: Methodsmentioning
confidence: 57%
“…As a result, there will not be sufficient DEP force on Cu 2+ when the ions are not close enough to the electrode surface, where |E2falserms|2 is relatively higher. Hence, although DEP force exists very near the surface edges according to previous investigation , it is not the dominant cause of ion adsorption in this work.…”
Section: Methodsmentioning
confidence: 57%
“…Using an IDME of micron scale, dC/dt is a competitive parameter to reflect tiny change at the electrode interface. [38,44] Therefore, ultra-trace S-protein detection can be expected. In practice, the lab-prepared sensors may have inconsistency due to different effective electrode surface and total recognition sites.…”
Section: Methodsmentioning
confidence: 99%
“…For trace particle detection in liquid, the pre-concentration of target particles is always crucial to a successful test [33][34][35]. Compared with most techniques for pre-concentration needing an extra incubation or equipment, AC electrokinetic (ACEK) effects can manipulate nanoparticles efficiently to realize target enrichment rapidly without extra processes or devices [36][37][38]. For relatively large molecules such as proteins, dielectrophoresis (DEP) force, an important ACEK effect, has been demonstrated as a dominant force applied on the particles [39,40].…”
Section: Methodsmentioning
confidence: 99%
“…The change of normalized capacitance per minute, i.e., dC/dt (%/min), directly reflects the S-protein adsorption level, by which the S-protein concentration in solution can be indicated. Using an IDME of micron scale, dC/dt is a competitive parameter to reflect tiny change at the electrode interface [30,37,43]. Therefore, ultra-trace S-protein detection can be expected.…”
Section: Methodsmentioning
confidence: 99%