We report a systematic study on rapid thermal annealing ͑RTA͒ of FePt nanoparticles. FePt particles with an average size of 8 nm were synthesized by a chemical solution method, and then annealed using RTA and conventional furnace annealing ͑FA͒. It was observed that FePt nanoparticles can be transformed from disordered A1 phase to ordered L1 0 phase at 650°C for 10 s using RTA, which is much shorter than the time needed for FA. The transmission electron microscopy and x-ray diffraction studies have revealed that the particle agglomeration and grain growth in the RTA treated samples are much less than in the FA treated samples. A linear correlation between the coercivity and the square root of the treatment time ͱ t was observed in the RTA treated samples, which implies that the phase transition is related to atomic diffusion of Fe atoms from Fe-rich shells into the Pt-rich cores.