Rapid micro-analysis of Al-In-Sn-O thin film using laser induced breakdown spectroscopy with picosecond laser pulses

Rapid quantitative analysis and optical properties of ZCTO thin films based on picosecond laser-induced breakdown spectroscopy

“…The sample of ZCTO thin film was fixed on a platform with a 3D displacement function synchronously controlled by a computer. The laser pulse is focused on the thin-film sample with an offset of 0.2 mm, and the diameter of the ablation crater on the sample surface is about 50 μm [21], so as to achieve the depth profile analysis of ZCTO film samples and ensure that each laser ablation at different locations and parameters of the displacement platform are controlled by the corresponding control software. The horizontal moving speed and the single moving distance of the displacement platform are 25 mm/s and 12.5 mm, respectively.…”

“…Especially in the field of analysis of thin-film materials, a lot of achievements have been made on LIBS technology [18][19][20]. In our previous works, picosecond LIBS technology has been employed to conduct rapid element quantitative analysis and LIBS micro-analysis on Al-In-Sn-O thin films [21] and Cu(In, Ga)Se 2 thin films [22,23]. In this study, the picosecond LIBS method was adopted for rapid micro-analysis of ZCTO thin film, including picosecond LIBS method for thin-film thickness analysis and the rapid quantitative analysis method for element concentration ratio, to explore the feasibility of picosecond LIBS method in the preparation and evaluation of high-performance ZCTO thin film and further explore the relationship between LIBS analysis and the optical properties of thin-film materials.…”

A chemically functionalized glass support for gold and silver metallic nanoparticle analysis with LIBS

“…Another important aspect related to this is that when using the functionalized glass support for the capture of metal nanoparticles in real samples, it is understood that the size distribution of the nanoparticles may vary signicantly, i.e., real samples may contain nanoparticles of various sizes, which would make it difficult to select the nanoparticle size to be used for calibration, which is a major difficulty when using LIBS for this type of analysis. However, the use of the functionalized glass support for the entrapment of nanoparticles, which favours their subsequent consolidation into a monolayer or metal lm, constitutes a key strategy to facilitate LIBS analysis since instead of analysing nanoparticles suspended in an aqueous medium, analysis is performed on thin metal lms for which the LIBS technique has demonstrated its analytical suitability and convenience, [69][70][71][72][73][74][75] without the problem of the dependence of the slope of the calibration curve on the particle size.…”

Atomic spectrometry update: review of advances in the analysis of metals, chemicals and materials

“…Lasers have also been used for the analysis of thin films . Techniques such as LA-ICP-MS, 251 laser ablation of solids in liquids followed by ICP-OES determination (LASIL-ICP-OES 252 and LIBS 253 ) have all been used during this review period. The paper by Weiss et al used both LA-ICP-MS and LIBS for the direct analysis of solid transition metal boride-based materials.…”

“…The SEM-EDS reached its limit at 110 nm, whereas the LASIL-ICP-OES method could analyse all of the films with good accuracy. Rapid micro-analysis of aluminium indium tin oxide thin films using LIBS with Nd:YAG 350 picosecond laser pulses was described by Liu et al 253 The thin films had been deposited by radiofrequency magnetron sputtering. The plasma formed was thoroughly characterised in terms of temperature (5063 ± 150 K) and electron number density (4.6 × 10 16 cm −3 ).…”