Rapid prototyping MEMS using Laminated Resin Printing

Jones, H. P.; Moore, Ciaran P.; Best, Andrew D.; Bubendorfer, Andrea; Glasson, Neil

doi:10.1117/12.2542968

Cited by 7 publications

(6 citation statements)

References 15 publications

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“…showed a similar manufacturing concept by laminated resin printing (LRP) which makes use of polymeric dry resins for the rapid prototyping of micro‐electromechanical systems (MEMS). [ 36 ] Their study strengthens the feasibility and capability of this novel method for structural 3D printing.…”

Section: Introductionmentioning

confidence: 62%

Hybrid structural electronics printing by novel dry film stereolithography and laser induced forward transfer

Levy

Toker²,

Winter³

et al. 2021

Nano Select

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3D printing has seen much progress in recent decades with the introduction of new materials and printing techniques. This article describes the combination of a novel, stereolithography (SLA) based method for structural material buildup with laser induced forward transfer (LIFT) printing of conductive and resistive elements and placement of commercial active and passive components for the additive manufacturing of 3D functional electronic devices. The structural material is composed of dry film photoresists that are exposed and laminated to form a stack which is later developed to remove unexposed area and reveal the desired free form shape. Interconnection using pillar penetration between the structural layers is described in detail. Several examples of functional objects (lamp, microphone) demonstrate the practicality of this novel, multi material printing method.

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Section: Introductionmentioning

confidence: 62%

Hybrid structural electronics printing by novel dry film stereolithography and laser induced forward transfer

Levy

Toker²,

Winter³

et al. 2021

Nano Select

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“…Small machines composed of a DLP projector and lamination system (shutter and movable stage) support the process. Typical resolutions achievable are in the order of 10 µm with 1920 × 1080 resolution projectors [150].…”

Section: Laminated Resin Printing (Lrp)mentioning

confidence: 99%

Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

Pasquale

2021

Micromachines

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Recently, additive manufacturing (AM) processes applied to the micrometer range are subjected to intense development motivated by the influence of the consolidated methods for the macroscale and by the attraction for digital design and freeform fabrication. The integration of AM with the other steps of conventional micro-electro-mechanical systems (MEMS) fabrication processes is still in progress and, furthermore, the development of dedicated design methods for this field is under development. The large variety of AM processes and materials is leading to an abundance of documentation about process attempts, setup details, and case studies. However, the fast and multi-technological development of AM methods for microstructures will require organized analysis of the specific and comparative advantages, constraints, and limitations of the processes. The goal of this paper is to provide an up-to-date overall view on the AM processes at the microscale and also to organize and disambiguate the related performances, capabilities, and resolutions.

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“…LRP is a photolithography-based technique where each layer is exposed before development of the 3D structure. 17 The layers consist of a dry film negative photoresist with a thickness of 5−10 μm, defining the layer height. A maskless UV light source is used to pattern the film, after which the Z stage lifts up to contact with the recently exposed section of the previous layers, building the structure in a layer-by-layer fashion.…”

Section: ■ Printing Microfluidic Structuresmentioning

confidence: 99%

“…The green area indicates the area of interest for microfluidics, combining sub-100 μm channel sizes with a build space of at least 1 × 1 cm. Data were compiled from literature sources. − …”

Section: Printing Microfluidic Structuresmentioning

confidence: 99%

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3D Printing: An Alternative Microfabrication Approach with Unprecedented Opportunities in Design

et al. 2020

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In the past decade, 3D printing technologies have been adopted for the fabrication of microfluidic devices. Extrusionbased approaches including fused filament fabrication (FFF), jetting technologies including inkjet 3D printing, and vat photopolymerization techniques including stereolithography (SLA) and digital light projection (DLP) are the 3D printing methods most frequently adopted by the microfluidic community. Each printing technique has merits toward the fabrication of microfluidic devices. Inkjet printing offers a good selection of materials and multimaterial printing, and the large build space provides manufacturing throughput, while FFF offers a great selection of materials and multimaterial printing but at lower throughput compared to inkjet 3D printing. Technical and material developments adopted from adjacent research fields and developed by the microfluidic community underpin the printing of sub-100 μm enclosed microchannels by DLP, but challenges remain in multimaterial printing throughput. With the feasibility of 3D printed microfluidics established, we look ahead at trends in 3D printing to gain insights toward the future of this technology beyond the sole prism of being an alternative fabrication approach. A shift in emphasis from using 3D printing for prototyping, to mimic conventionally manufactured outputs, toward integrated approaches from a design perspective is critically developed.

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Rapid prototyping MEMS using Laminated Resin Printing

Cited by 7 publications

References 15 publications

Hybrid structural electronics printing by novel dry film stereolithography and laser induced forward transfer

Hybrid structural electronics printing by novel dry film stereolithography and laser induced forward transfer

Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

3D Printing: An Alternative Microfabrication Approach with Unprecedented Opportunities in Design

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