Micro- And Nanotechnology: Materials, Processes, Packaging, and Systems IV 2008
DOI: 10.1117/12.810669
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Rapid prototyping of microfluidic devices using imprinting: application to microvalves and micropumps

Abstract: A method to create microfluidic devices by utilizing hot imprinting stamps formed using printed circuit boards is demonstrated. Very large microfluidic devices (15×15 cm 2 ) can be created with lateral features down to 100 µm and depths of nominally 17-70 µm. Room temperature solvent bonding was found to be a simple method of sealing the channels. The work also decribes the fabriation and operation of thermally actuated microvalves with sub-second switching and micropumps based on the imprinting techniques des… Show more

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