“…The range of different spatial formats of CMs can facilitate new MEMS devices with innovative geometries, which are not possible from traditional substrates such as metals, silicon, and glass. Among the CMs, carbon fiber (CF) 11–13 is a very attractive substrate for electrical signal transduction in miniaturized electrochemical sensors due to the unique advantageous features such as the small dimensions (5–30 μm), low capacitive current, thermal stability, superior mechanical strength, light weight with a specific strength (strength/density) that can be produced from a roll-to-roll process 14 . All these merits are advantageous when CF serves as the substrate in the fabrication of sensors such as strain 15 , pressure 16 , chemical 17,18 , as well as optical and humidity 19 , and MEMS for harvesting energy devices and MEMS scanning micromirror arrays 20 .…”