Rapid reflectance-anisotropy spectroscopy as an optical probe for real-time monitoring of thin film deposition

Ortega‐Gallegos, J.; Guevara-Macías, L. E.; Lastras‐Martínez, A.; Ariza-Flores, D.; Balderas‐Navarro, R. E.; Lastras-Martı́nez, L. F.

doi:10.1063/1.5024494

Cited by 1 publication

(1 citation statement)

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“…In addition, in situ diffuse reflectance spectroscopy was utilized to accurately determine and monitor the actual temperature and thickness of CdTe films grown on GaAs substrates by MBE [112] . Fleischer et al studied the RAS of Fe 3 O 4 (110) film with different thicknesses, suggesting that the clear correlation of the RAS minima position with thickness can be employed to establish RAS as an in situ nondestructive optical method for monitoring thin-film growth [113] . To explore more potential applications of this characterization technique, Ortega et al conducted a detailed analysis of its oscillation mechanism by RAS [114,115] .…”

Section: Other Surface Properties Analysis Techniquesmentioning

confidence: 99%

Development of in situ characterization techniques in molecular beam epitaxy

Shen,

Zhan,

et al. 2024

J. Semicond.

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Ex situ characterization techniques in molecular beam epitaxy (MBE) have inherent limitations, such as being prone to sample contamination and unstable surfaces during sample transfer from the MBE chamber. In recent years, the need for improved accuracy and reliability in measurement has driven the increasing adoption of in situ characterization techniques. These techniques, such as reflection high-energy electron diffraction, scanning tunneling microscopy, and X-ray photoelectron spectroscopy, allow direct observation of film growth processes in real time without exposing the sample to air, hence offering insights into the growth mechanisms of epitaxial films with controlled properties. By combining multiple in situ characterization techniques with MBE, researchers can better understand film growth processes, realizing novel materials with customized properties and extensive applications. This review aims to overview the benefits and achievements of in situ characterization techniques in MBE and their applications for material science research. In addition, through further analysis of these techniques regarding their challenges and potential solutions, particularly highlighting the assistance of machine learning to correlate in situ characterization with other material information, we hope to provide a guideline for future efforts in the development of novel monitoring and control schemes for MBE growth processes with improved material properties.

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