Rapid-response, low-detection-limit, positive-negative air pressure sensing: GaN chips integrated with hydrophobic PDMS films
Sizhe Gui,
Binlu Yu,
Yumeng Luo
et al.
Abstract:Despite the importance of positive and negative pressure sensing in numerous domains, the availability of a single sensing unit adept at handling this dual task remains highly limited. This study introduces a compact optical device capable of swiftly and precisely detecting positive and negative pressures ranging from −35 kPa to 35 kPa. The GaN chip, which serves as a core component of the device, is monolithically integrated with light-emitting and light-detecting elements. By combining a deformable PDMS film… Show more
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