Rapid Stencil Mask Fabrication Enabled One-Step Polymer-Free Graphene Patterning and Direct Transfer for Flexible Graphene Devices

Yong, Keong; Ashraf, Ali; Kang, Pilgyu; Nam, SungWoo

doi:10.1038/srep24890

Cited by 45 publications

(33 citation statements)

References 52 publications

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“…25 But this approach strongly relies on the initial positions of graphene stack edges, and the distribution and geometry of the as-produced GNRs are thus limited to discrete concentric ribbon circles. 25 In parallel, tailoring the geometry of GNRs into elastic forms [26][27][28][29] has been recognized as the key to gain extra stretchability for the rigid graphene, which is rather flexible but not much stretchable. The maximum tolerable strains of graphene sheets, reported in the literature, ranges from 1 to 3%.…”

Section: Introductionmentioning

confidence: 99%

Highly stretchable graphene nanoribbon springs by programmable nanowire lithography

et al. 2019

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Graphene nanoribbons are ideal candidates to serve as highly conductive, flexible, and transparent interconnections, or the active channels for nanoelectronics. However, patterning narrow graphene nanoribbons to <100 nm wide usually requires inefficient micro/nano fabrication processes, which are hard to implement for large area or flexible electronic and sensory applications. Here, we develop a precise and scalable nanowire lithography technology that enables reliable batch manufacturing of ultra-long graphene nanoribbon arrays with programmable geometry and narrow width down to~50 nm. The orderly graphene nanoribbons are patterned out of few-layer graphene sheets by using ultra-long silicon nanowires as masks, which are produced via in-plane solid-liquid-solid guided growth and then transferred reliably onto various stiff or flexible substrates. More importantly, the geometry of the graphene nanoribbons can be predesigned and engineered into elastic two-dimensional springs to achieve outstanding stretchability of >30%, while carrying stable and repeatable electronic transport. We suggest that this convenient scalable nanowire lithography technology has great potential to establish a general and efficient strategy to batch-pattern or integrate various two-dimensional materials as active channels and interconnections for emerging flexible electronic applications.

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Section: Introductionmentioning

confidence: 99%

Highly stretchable graphene nanoribbon springs by programmable nanowire lithography

et al. 2019

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“…The resulting graphene patterns, however, have poor feature resolution. Photolithography‐based microfabrication for graphene patterning is relatively complex and requires multiple steps such as film deposition, lithography, and etching. Recently, various interesting methods have been developed for patterning and transferring graphene‐based materials onto different substrates.…”

Section: Introductionmentioning

confidence: 99%

High‐Resolution Patterning and Transferring of Graphene‐Based Nanomaterials onto Tape toward Roll‐to‐Roll Production of Tape‐Based Wearable Sensors

Oren

Ceylan

Schnable

et al. 2017

Adv Materials Technologies

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nonconventional substrates (e.g., paper, tape, and cloth) [7][8][9][10] have been widely utilized as the base materials of flexible electronic devices. Conductive nanomaterials, such as carbon nanotubes, metal oxide nanowires, and graphene, have also attracted considerable attention as functional materials for applications ranging from transistors, to sensors, to energy harvesting and storage devices. [11][12][13][14][15][16][17][18][19][20][21][22] Among these conductive nanomaterials, graphene plays a key role in producing next-generation sensors owing to its unique properties, including atomic thickness, large surface area, fast electron mobility, good piezoresistivity, and high mechanical flexibility. [23][24][25][26][27] As a result, integrations between flexible substrate materials and graphene-based nanomaterials have led to a variety of sensors and other electronic devices through development of novel fabrication processes, advancing emerging and significant fields such as real-time motion tracking, [28] structural and human health monitoring, [29][30][31] electronic skin sensing, [32][33][34][35][36] and humanized robotic manipulation. [37] It is well known that repeated mechanical exfoliation to peel single-or few-layer graphene from bulk graphite using sticky tape and transfer it to another surface is rather uncontrollable in terms of the number of graphene layers, location, and size of the peeled graphene. [38] Recently, graphene film electrodes at centimeter scale have been fabricated by peeling tape from a commercial graphite foil for the detection of glucose, [39] but the obtained electrodes did not have well-defined shapes or control over thickness. Physically rubbed graphene electrodes have also been produced by directly placing solid-state graphene powders at a channeled adhesive surface and then rubbing against the surface. [40] The resulting graphene patterns, however, have poor feature resolution. Photolithography-based microfabrication for graphene patterning [41][42][43][44][45][46][47][48][49] is relatively complex and requires multiple steps such as film deposition, lithography, and etching. Recently, various interesting methods have been developed for patterning and transferring graphene-based materials onto different substrates. For example, laser printing of graphene has been studied with variable laser energy, spot size, and pulse duration. [50][51][52][53][54] This method, however, requires sophisticated lasers and is limited to producing patterns with minimum feature size of several tens of micrometers. An ink-jet printing This paper reports on a simple and versatile method for patterning and transferring graphene-based nanomaterials onto various types of tape to realize flexible microscale sensors. The method involves drop-casting a graphene film on a prepatterned polydimethylsiloxane (PDMS) surface containing negative features by graphene suspensions, applying Scotch tape to remove the excess graphene from the nonpatterned areas of the PDMS surface, and then transferring the patte...

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“…Parylene‐C has been also shown to be amenable for fabricating shadow masks, but its fabrication process is complex and requires multiple time‐consuming steps including chemical vapor deposition, thermal evaporation, and reactive ion etching . Flexible membranes made of other polymeric materials such as polyimide (PI), polytetrafluoroethylene, poly(methyl methacrylate) mostly fabricated by laser micromachining have been investigated by many groups . However, severe polymer warping during laser cutting, low control over the feature size, and high cost of the process are critical issues.…”

mentioning

confidence: 99%

A Novel Large‐Scale, Multilayer, and Facilely Aligned Micropatterning Technique Based on Flexible and Reusable SU‐8 Shadow Masks

Moradi

Bandari

et al. 2019

Adv Materials Technologies

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A simple method to fabricate flexible, mechanically robust, and reusable SU‐8 shadow masks is demonstrated. This shadow mask technology has high pattern flexibility as various shapes with different dimensions can be created. The fabricated shadow masks are characterized in terms of the resolution, reusability, and capability of multilayer surface micropatterning. Fabrication of a new plastic photomask for the exposure process simplifies the shadow mask fabrication process and results in higher resolution in the shadow mask structures compared to the commercial chromium photomasks. For the multilayer surface micropatterning technology, a simple and fast alignment technique based on SU‐8 pillars and without usage of any microscopic tools is reported. This unique method leads to a less complicated alignment process with the alignment accuracy of ≈2 µm. The proposed shadow mask technology can be easily employed for wafer‐scale micropatterning process. The capability of fabricated SU‐8 shadow masks in micropatterning on polymer thin films is evaluated by fabricating metallic contacts on poly(3,4‐ethylenedioxythiophene) samples and electrical characterization.

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Rapid Stencil Mask Fabrication Enabled One-Step Polymer-Free Graphene Patterning and Direct Transfer for Flexible Graphene Devices

Cited by 45 publications

References 52 publications

Highly stretchable graphene nanoribbon springs by programmable nanowire lithography

Highly stretchable graphene nanoribbon springs by programmable nanowire lithography

High‐Resolution Patterning and Transferring of Graphene‐Based Nanomaterials onto Tape toward Roll‐to‐Roll Production of Tape‐Based Wearable Sensors

A Novel Large‐Scale, Multilayer, and Facilely Aligned Micropatterning Technique Based on Flexible and Reusable SU‐8 Shadow Masks

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