2015
DOI: 10.1002/ecj.11690
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Rare‐Earth Plasma Beyond Extreme Ultraviolet (BEUV) Sources at 6.x nm

Abstract: SUMMARYWe have studied self-absorption effects of a laserproduced plasma (LPP) source at 6.x nm as a function of laser pulse duration and viewing angle. The spectral profiles are shown to have a strong dependence on the viewing angle. Absorption effects are less pronounced when a 150-ps pulse duration is used due to reduced opacity resulting from plasma expansion. Conversion efficiencies and ion energies are also measured as a function of laser pulse duration and laser power density. A maximum conversion effic… Show more

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Cited by 2 publications
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“…It would be expected that ionization bottlenecks should be observed at Sn 2+ , Sn 4+ and Sn 14+ . Examples of this discrepancy in other research can be seen in the ion distribution plots of Gd [8,26,27] and Sn [28].…”
Section: Ionization Bottlenecksmentioning
confidence: 93%
“…It would be expected that ionization bottlenecks should be observed at Sn 2+ , Sn 4+ and Sn 14+ . Examples of this discrepancy in other research can be seen in the ion distribution plots of Gd [8,26,27] and Sn [28].…”
Section: Ionization Bottlenecksmentioning
confidence: 93%