Rate-dependent asymmetric hysteresis modeling and robust adaptive trajectory tracking for piezoelectric micropositioning stages

Abstract

Hysteresis is an inherent characteristic of piezoelectric materials that can be determined by not only the historical input but also the input signal frequency. Hysteresis severely degrades the positioning precision of piezoelectric micropositioning stages. In this study, the hysteresis characteristics and the excitation frequency effects on the hysteresis behaviors of the piezoelectric micropositioning stage are investigated. Accordingly, a rate-dependent asymmetric hysteresis Prandtl-Ishlinskii (RDAPI) model is developed by introducing a dynamic envelope function into the play operators of the Prandtl-Ishlinskii (PI) model. The RDAPI model uses a relatively simple analytical structure with fewer parameters then other modified PI model to characterize the rate-dependent and asymmetric hysteresis behavior in piezoelectric micropositioning stages. Considering practical situations with the uncertainties and external disturbances associated with the piezoelectric micropositioning stages, the system dynamics are described using a secondorder differential equation. On this basis, a corresponding adaptive robust control method that does not involve the construction of a complex hysteretic inverse model is developed. The Lyapunov analysis method proves the stability of the entire closed-loop control system. Experiments confirm that the proposed RDAPI model achieves a significantly improved accuracy compared with the PI model. Fur-

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