Thermal sensors are used in Intel processors in order to measure and regulate the chip's temperature. This is useful to insure that the temperature does not exceed the reliability limit and also to optimize processor performance. Several sensors developed in Intel processes are reviewed and their evolution over different process generations is explained. The design tradeoffs and system requirements for these sensors are discussed.
/͘ /EdZKhd/KEThermal sensors are utilized in Intel Processors in order to provide information for the maximum temperature of operation and fan regulation at temperatures down to 50 o C. When the IC temperature exceeds the reliability limit the chip throttles (reduces) the frequency to allow it to cool down. There is also a catastrophic mechanism which shuts down the system completely if the chip temperature is a predetermined amount above the maximum allowed.Today's microprocessors are thermally limited in many applications, so reasonably accurate temperature readings are essential in order to maximize performance. There are fairly large thermal gradients across the core, which vary for different instructions, so it is necessary to position thermal sensors near hot-spots. In addition, the locations of the hot-spots may not be predictable during the design phase. Thus it is necessary for hot-spot sensors to be small enough to be moved late in the design cycle or even after first Silicon.In addition, in advanced processes, the chip frequency at a lower voltage exhibits an inverse temperature dependence (ITD). The temperature measurements enable the chip to raise the voltage under these conditions in order to maintain performance. Thus it is also important to position sensors near cold spots as well as hot spots.In this paper, several published sensors used in the Intel Israel design site are reviewed. We will focus on how the sensing technology evolved over several generations of processes from 90nm to 22nm. Architecture and analog circuit innovations were implemented which allowed the sensor's area and power to be scaled by large factors (3-10X) between processes, without losing performance. This is despite the fact that analog circuits in generally do not scale or even reverse scale between different process technologies.Several authors have recently demonstrated high accuracy (0.2 o C ) BJT-based sensors [1, 2]. However, these sensors are limited for multiple hot-spot measurement because of their size (0.1 -0.26 mm2). In microprocessors, it is sufficient to measure temperature at somewhat lower accuracy (+-3 o C at throttle; +-5 o C at 50C), but the sensor has to be compact enough to be positioned in multiple locations per core. Additionally, the sensor needs to be quick enough to capture temperature gradients, which in a processor are ~ 1ms, as will be shown later.Most sensors in the published literature have sampling speeds < 10S/sec, which is not fast enough for processor applications. In addition, speed/latency can be utilized to lower the power, by powering down the sensor between...