RBS and optical studies of ion-implanted amorphous silicon carbide layers

Romanek, J.; Kobzev, A.P.; Kulik, M.; Żuk, J.

doi:10.1016/s0042-207x(02)00687-5

Vacuum

2003

DOI: 10.1016/s0042-207x(02)00687-5

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RBS and optical studies of ion-implanted amorphous silicon carbide layers

J. Romanek

A.P. Kobzev

M. Kulik

et al.

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RBS and optical studies of ion-implanted amorphous silicon carbide layers

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