RBS-ERDA, XPS and XRD characterizations of PECVD tungsten nitride films

Synthesis of nano-structure tungsten nitride thin films on silicon using Mather-type plasma focus

“…Various techniques have been employed for the synthesis of tungsten nitride films such as pulsed laser depositions (14), reactive magnetron sputtering (12,15), atomic layer *Corresponding author. Email: ahussnainsyed@gmail.com deposition (16), physical vapor deposition (17,18), and plasma enhanced chemical vapor deposition (18). We employed plasma focus device for deposition of tungsten nitride thin films on silicon substrate at room temperature by different deposition shots.…”

Synthesis of WN(NMe2)3 as a Precursor for the Deposition of WNx Nanospheres

“…The N 1s spectra confirm that the WN x is partially oxidized; the deconvoluted spectra indicate that two species are present (BEs 400.2 and 401.6 eV). These BEs are higher than those for unoxidized WN x (N1s 397 eV)65 and are assigned to oxidized WN x . The O 1s spectra also suggest that oxygen is bound to W (BE = 530.3 eV)67 and also to C (BE = 532 eV)66 present in the deposited material (see Supporting Information).…”

“…The sum of the bond angles around N2/ N2A (359.97°) and N3 (359.96°) in compound 1 is essentially 360°, which indicates sp 2 hybridization of the amide nitrogen atoms. These www.eurjic.org BEs are higher than those for unoxidized WN x (N1s 397 eV) [65] and are assigned to oxidized WN x . The deviation from tetrahedral geometry found in 1 is manifested in the expansion of the N2-W1-N3/N2A-W1-N3/N2A-W1-N2 bond angles (11)°] relative to 109.5°.…”

“…This is likely due to the lower steric bulk and stronger donor (σ, π) character of the dimethylamide ligands found in 1. [65,66] The N 1s spectra confirm that the WN x is partially oxidized; the deconvoluted spectra indicate that two species are present (BEs 400.2 and 401.6 eV). Since the amide planes of 1 are parallel to the WϵN axis, substantial π donation (NǞW) into the d xy and d x 2 -y 2 orbitals of the W VI center is likely, especially when considered within the context of the structurally related complexes [Mo 2 (NMe 2 ) 6 ] [58] and [W 2 (NMe 2 ) 6 ], [59] in which π donation is strong.…”

“…Figure 5 shows the deconvoluted W 4f and 5p 3/2 peaks, and Figure 6 shows the deconvoluted N 1s peak. The binding energies (BEs) of the W 4f 7/2 (34.0 eV), 4f 5/2 (36.1 eV), and 5p 3/2 (39.8 eV) indicate that partially oxidized WN x nanospheres are present on the substrate surface and the oxidation is most likely on the surface of the nanoparticles due to post‐growth exposure to air 65,66. The N 1s spectra confirm that the WN x is partially oxidized; the deconvoluted spectra indicate that two species are present (BEs 400.2 and 401.6 eV).…”