2023
DOI: 10.1088/1748-0221/18/02/c02061
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RD50-MPW3: a fully monolithic digital CMOS sensor for future tracking detectors

Abstract: The CERN-RD50 CMOS working group develops the RD50-MPW series of monolithic high-voltage CMOS pixel sensors for potential use in future high luminosity experiments such as the HL-LHC and FCC-hh. In this contribution, the design of the latest prototype in this series, RD50-MPW3, is presented. An overview of its pixel matrix and digital readout periphery is given, with discussion of the new structures implemented in the chip and the problems they aim to solve. The main analogue and digital features of the sensor… Show more

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Cited by 8 publications
(4 citation statements)
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“…RD50 has a common project called RD50 Multi Project Wafer (RD50 MPW) of Depleted Monolithic Active Pixel Sensors (DMAPS). There has been three designs, RD50-MPW1, RD50-MPW2 and RD50-MPW3 [30][31][32]. They show good results under irradiations with neutrons up to 2 × 10 15 n eq /cm 2 [33].…”
Section: Monolithic Detectorsmentioning
confidence: 99%
“…RD50 has a common project called RD50 Multi Project Wafer (RD50 MPW) of Depleted Monolithic Active Pixel Sensors (DMAPS). There has been three designs, RD50-MPW1, RD50-MPW2 and RD50-MPW3 [30][31][32]. They show good results under irradiations with neutrons up to 2 × 10 15 n eq /cm 2 [33].…”
Section: Monolithic Detectorsmentioning
confidence: 99%
“…However, to meet all these requirements in a single device, further R&D is needed to advance the performance of the sensors. The series of RD50-MPW chips are generic R&D prototypes, in the 150 nm High Voltage CMOS (HV-CMOS) technology process from LFoundry S.r.l, aimed at further developing depleted monolithic CMOS sensors while tackling the challenges of especially high pixel granularity (50 μm × 50 μm), fast timing resolution (0.1 ns) and excellent radiation tolerance (10 16 n eq /cm 2 ). An overview of the main results achieved so far within this programme is available in [1].…”
Section: Introductionmentioning
confidence: 99%
“…It was fabricated on standard value, 1.9 kΩ•cm and 3 kΩ•cm resistivity p-type substrate. A detailed description of the design of RD50-MPW3 can be found in [2]. This paper presents the latest evaluation results of RD50-MPW3 in 1.9 kΩ•cm, including laboratory measurements in section 2 and test beam measurements in section 3.…”
Section: Introductionmentioning
confidence: 99%
“…Both types of sensors are undergoing significant development and are being used in different applications [4]. Monolithic sensors [5,6] are used in applications where mass reduction and a low material budget are the most limiting used in applications where mass reduction and a low material budget are the most limiting requirements. An example of their use and performance can be found in the STAR [7] experiment or in the work published by the RD50 collaboration [8].…”
Section: Introductionmentioning
confidence: 99%