2021
DOI: 10.1364/ol.439720
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Reaching fiber-laser coherence in integrated photonics

Abstract: We self-injection-lock a diode laser to a 1.41 m long, ultra-high Q integrated resonator. The hybrid integrated laser reaches a frequency noise floor of 0.006 H z 2 / H z at 4 MHz offset, corresponding to a Lorentzian linewidth below 40 mHz—a record among semiconductor lasers. It also exhibits exceptional stability at low-offset frequencies, with frequency noise of … Show more

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Cited by 94 publications
(53 citation statements)
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“…It is worth mentioning that integrating both III-V and SiN on the same substrate, ensures a robust coupling between the gain and the external cavity regardless of the temperature. Other linewidth narrowing methods, such as hybrid integration with chip-to-chip butt-coupling [22,47], suffer from positional misalignment between different substrates due to thermal expansion mismatch over such a wide temperature range.…”
Section: High-temperature Advantage Of Short-wavelength Picsmentioning
confidence: 99%
“…It is worth mentioning that integrating both III-V and SiN on the same substrate, ensures a robust coupling between the gain and the external cavity regardless of the temperature. Other linewidth narrowing methods, such as hybrid integration with chip-to-chip butt-coupling [22,47], suffer from positional misalignment between different substrates due to thermal expansion mismatch over such a wide temperature range.…”
Section: High-temperature Advantage Of Short-wavelength Picsmentioning
confidence: 99%
“…In addition, heterogeneous silicon photonics offers a path towards realizing ultra-stable, high-precision laser performance in a compact and mobile platform and has demonstrated tremendous scalability with 300 mm , which significantly reduces its white frequency noise floor from that of a monolithic III-V DFB [10]. Self-injection locking to a high-Q Si3N4 spiral resonator further suppresses the frequency noise (2), ultimately limited by thermo-refractive noise (TRN) [11,12]. Subsequent PDH locking to a high-finesse, micro-fabricated vacuum cavity [13][14][15] overcomes these limits, drastically reducing the noise down to the cavity thermal noise floor at offsets within the servo bandwidth (3).…”
Section: Introductionmentioning
confidence: 99%
“…Silicon nitride (Si 3 N 4 ) photonics adds even more functionality, taking advantage of CMOS compatibility, wide bandgap, and lowloss integrated waveguides [31][32][33]. Si 3 N 4 -based lasers have especially leveraged low-loss [10,11,[34][35][36] and have demonstrated coherence on par with commercial fiber lasers [12]. However, they are ultimately limited by thermo-refractive noise (TRN), which has kept the fractional frequency instability of planar waveguide and solid dielectric resonators above the 10 −13 level typical of quartz oscillators [37].…”
Section: Introductionmentioning
confidence: 99%
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“…The main accessible parameter is the resonator volume, which is physically limited to the size of the semiconductor chip. Recently, 1.41-m long spiral resonators have been demonstrated to suppress thermorefractive noise fluctuations and to dramatically quench laser noise at low offset frequencies [28]. Here, we explore the use of a large mode volume 20.5-mm diameter annulus resonator which exhibits low intrinsic temperature fluctuations.…”
mentioning
confidence: 99%