2001
DOI: 10.1351/pac200173020331
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Reactions of d0 alkylidene and amide complexes with silanes

Abstract: CMe 3 , 4) yielded novel metallasilacyclobutadienes and a metalladisilacyclohexadiene, respectively. In comparison, the reactions between M(NMe 2 ) 4 (M = Ti, Zr, Hf) and silanes were found to give aminosilanes and metal amide hydride species which were perhaps involved in the formation of titanium-silicon-nitride (Ti-Si-N) ternary materials.

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Cited by 10 publications
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“…We have studied how H−Si bonds in silanes react with the π bonds in the MCHR and with the d−p π bonds in the M−NR 2 moieties and mechanisms in these reactions. In the former, we chose the Cp-free d 0 high-oxidation-state alkylidene complexes (RCH 2 )Ta(PMe 3 ) 2 (CHR‘) 2 , containing phosphine ligands, in the hope that such ligands would help stabilize the resulting reaction products. , In the latter, Cp-free d 0 high-oxidation-state amide complexes M(NMe 2 ) n (M = Ti, Zr, Hf, Ta) were used. The reactions of metal amides with silanes have also played an important role in the formation of M−Si−N ternary films as diffusion barrier materials in very-large-scale-integrated microelectronic devices, as discussed below.…”
Section: Reactions Of Silanes With Alkylidene and Amide Complexesmentioning
confidence: 99%
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“…We have studied how H−Si bonds in silanes react with the π bonds in the MCHR and with the d−p π bonds in the M−NR 2 moieties and mechanisms in these reactions. In the former, we chose the Cp-free d 0 high-oxidation-state alkylidene complexes (RCH 2 )Ta(PMe 3 ) 2 (CHR‘) 2 , containing phosphine ligands, in the hope that such ligands would help stabilize the resulting reaction products. , In the latter, Cp-free d 0 high-oxidation-state amide complexes M(NMe 2 ) n (M = Ti, Zr, Hf, Ta) were used. The reactions of metal amides with silanes have also played an important role in the formation of M−Si−N ternary films as diffusion barrier materials in very-large-scale-integrated microelectronic devices, as discussed below.…”
Section: Reactions Of Silanes With Alkylidene and Amide Complexesmentioning
confidence: 99%
“…Kinetic studies of the reactions of 37 with H 2 SiMePh and D 2 SiMePh at 10 °C show that a dissociative mechanism is operative in this reaction. , This pathway involves the loss of a PMe 3 ligand to open a coordination site on the Ta center, followed by rate-determining addition of the silane to the TaC bond to give 39 (Scheme ). For example, a steady-state approximation gives eqs 15 and 16 44b…”
Section: Reactions Of Silanes With Alkylidene and Amide Complexesmentioning
confidence: 99%