1969
DOI: 10.1021/i260031a012
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Reactions of Titanium Tetrachloride in a Radio-Frequency Plasma Torch

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Cited by 8 publications
(1 citation statement)
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“…Previously, several researchers had studied the feasibility of producing titanium powders from TiCl 4 using plasma. Miller et al [3] proposed equilibrium calculations of Ar-Ti-Cl-H by solving equilibrium constant equations of 101.325 kPa total pressure. It seems that no polyatomic species existed above 4,000 K and the experimental results show that TiCl 4 was reduced to TiCl 3 by H 2 using RF plasma.…”
Section: Introductionmentioning
confidence: 99%
“…Previously, several researchers had studied the feasibility of producing titanium powders from TiCl 4 using plasma. Miller et al [3] proposed equilibrium calculations of Ar-Ti-Cl-H by solving equilibrium constant equations of 101.325 kPa total pressure. It seems that no polyatomic species existed above 4,000 K and the experimental results show that TiCl 4 was reduced to TiCl 3 by H 2 using RF plasma.…”
Section: Introductionmentioning
confidence: 99%