Reactive arc vapor ion deposition of TiN, ZrN and HfN

The effect of deposition conditions on the properties of Zr-carbide, Zr-nitride and Zr-carbonitride coatings – a review

“…The ZrN films were deposited on polished flat M2 steel substrates by changing the nitrogen pressure and substrate bias voltage using an arc vapor ion deposition process. 154 Dense columnar coatings with their main axis perpendicular to the interface were produced. The coatings became featureless under low pressure and low voltage deposition conditions.…”

Some Applications of Cathodic Arc Coatings

“…With the perfection of TiN, a natural extension of the technology was to investigate, test, and produce a range of other compounds, and in particular other binary nitrides such as CrN, ZrN, and HfN [6,7]. CrN was found to exhibit a lower coefficient of friction than TiN [6].…”

Microstructure, properties and applications of Zr-carbide, Zr-nitride and Zr-carbonitride coatings: a review

“…15 The ZrN films were deposited on M2 steel using an arc vapor ion deposition process. 117 Scratch test results show that adhesion and film strength varied inversely with microhardness. The load required for lower critical failure increased as the bias voltage was increased.…”