Reactive Deposition of Al2O3 Coatings by Thermal Evaporation in a High-Current Discharge with a Hollow Anode

Kamenetskikh, A. S.; Гаврилов, Н. М.; Surkov, Yu. S.; Tretnikov, P. V.; Чукин, А. В.

doi:10.1134/s1027451020010061

Cited by 2 publications

(1 citation statement)

References 20 publications

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“…The high degree of oxygen dissociation obtained in a discharge with metal walls is explained by the features of design and application of the electrode system. Forced contraction of the discharge column in the anode region leads to the formation of a positive anode potential drop (10-20 eV) [29]. The high density of oppositely directed flows of oxygen and fast electrons accelerated in the anode space charge layer provide a high rate of oxygen dissociation.…”

Section: Discussionmentioning

confidence: 99%

Application of the catalytic probe method for measuring the concentration of oxygen atoms in Ar/O₂ plasma of a low-pressure arc

Kamenetskikh

Гаврилов

Krivoshapko

et al. 2021

Plasma Sources Sci. Technol.

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The monitoring of the degree of oxygen dissociation in the discharge plasma is critical for various plasma applications associated with the etching and oxidation of surfaces or the reactive deposition of oxide coatings. The use of existing measurement techniques is limited owing to their complexity, significant error rate, or application conditions. This study deals with the development of a catalytic probe method for measuring the degree of oxygen dissociation in dense arc discharge plasma. A method for measuring and processing the experimental results is presented, which allows the determination of the thermal contribution of the heterogeneous recombination of oxygen atoms at a high total heating power of the catalytic probe by particle streams and plasma radiation. The atomic oxygen concentration was measured in low-pressure arc plasma with a self-heating hollow cathode in an Ar/O2 mixture with changes in the discharge current and oxygen partial pressure over a wide range of 30–70 A and 0.2–0.6 Pa, respectively. It has been demonstrated that the maximum degree of oxygen dissociation (up to 25% of the O2 content) is achieved at the maximum discharge current and is practically independent of the oxygen flow, whereas the highest concentration of atomic oxygen is achieved when the maximum current and O2 flow values are combined. This conclusion is important for technologies based on plasma-chemical processes in high-current discharges.

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Section: Discussionmentioning

confidence: 99%

Application of the catalytic probe method for measuring the concentration of oxygen atoms in Ar/O₂ plasma of a low-pressure arc

Kamenetskikh

Гаврилов

Krivoshapko

et al. 2021

Plasma Sources Sci. Technol.

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show abstract

Energy gaps, refractive index and photon emission from point defects in copper-doped Gd2O3 nanocrystalline films

Kuznetsova

Zatsepin

et al. 2022

Journal of Alloys and Compounds

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Reactive Deposition of Al2O3 Coatings by Thermal Evaporation in a High-Current Discharge with a Hollow Anode

Cited by 2 publications

References 20 publications

Application of the catalytic probe method for measuring the concentration of oxygen atoms in Ar/O₂ plasma of a low-pressure arc

Application of the catalytic probe method for measuring the concentration of oxygen atoms in Ar/O₂ plasma of a low-pressure arc

Energy gaps, refractive index and photon emission from point defects in copper-doped Gd2O3 nanocrystalline films

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Reactive Deposition of Al2O3 Coatings by Thermal Evaporation in a High-Current Discharge with a Hollow Anode

Cited by 2 publications

References 20 publications

Application of the catalytic probe method for measuring the concentration of oxygen atoms in Ar/O2 plasma of a low-pressure arc

Application of the catalytic probe method for measuring the concentration of oxygen atoms in Ar/O2 plasma of a low-pressure arc

Energy gaps, refractive index and photon emission from point defects in copper-doped Gd2O3 nanocrystalline films

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Product

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Application of the catalytic probe method for measuring the concentration of oxygen atoms in Ar/O₂ plasma of a low-pressure arc

Application of the catalytic probe method for measuring the concentration of oxygen atoms in Ar/O₂ plasma of a low-pressure arc