2002
DOI: 10.1016/s0167-9317(02)00801-8
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Reactive sputter deposition and properties of TaxN thin films

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Cited by 155 publications
(79 citation statements)
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“…The intrinsic stress in the manufactured films has been found compressive (Table 1). Comparing the values with those reported by Riekkinen et al, [6] we obtained a higher stress for the film having lower resistivity (sample a) and lower stress for the samples c and f, respectively, characterised by high electrical resistivity, the disagreement being likely due to the different deposition conditions.…”
Section: Resultssupporting
confidence: 75%
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“…The intrinsic stress in the manufactured films has been found compressive (Table 1). Comparing the values with those reported by Riekkinen et al, [6] we obtained a higher stress for the film having lower resistivity (sample a) and lower stress for the samples c and f, respectively, characterised by high electrical resistivity, the disagreement being likely due to the different deposition conditions.…”
Section: Resultssupporting
confidence: 75%
“…[8] Such a structure is consistent with the resistivity datum reported above (Table 1). Accordingly, Riekkinen et al [6] reported a resistivity of 234 µ cm for Ta 2 N phases. The sample b shows the Ta4f 7/2 component centred at 23.7 eV and can be attributed to a TaN phase.…”
Section: Resultsmentioning
confidence: 99%
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“…TaN film material is widely used in many fields because of its excellent performances [1][2][3][4][5][6]. In the semiconductor industry, TaN film is used as a copper diffusion barrier layer mainly due to its high electrical conductivity and good thermal stability.…”
Section: Introductionmentioning
confidence: 99%
“…1,2 Several techniques have been applied to fabricate TaN thin films, including reactive magnetron sputtering, 3 chemical vapor deposition (CVD), 4,5 low-energy nitrogen implantation, and metalorganic chemical vapor deposition (MOCVD). 6,7 Among these techniques, MOCVD is considered as the primary candidate for applying TaN films onto microelectronic devices and hard coatings.…”
Section: Introductionmentioning
confidence: 99%