Readability of intentionally degraded two dimensional code marks printed lithographically using a squared optical fiber matrix

Watanabe, Jun; Iwasaki, Jun-ya; Horiuchi, Toshiyuki

doi:10.1117/12.2192647

Cited by 2 publications

(1 citation statement)

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“…[12][13][14] In addition, optical fibers with squared ends were developed for improving the shapes of mark cells, 15) and the optical fibers were bound in a matrix. 16) Because bright and dark codemark cells with a square shape are directly assigned by simply lighting and extinguishing LEDs, this combination of LED and fiber matrices is very effective for printing arbitrary code marks easily but precisely. High-quality code-mark patterns are printed without using any masks or reticles.…”

Section: Introductionmentioning

confidence: 99%

Readability dependence on lithography conditions for printing code marks using a squared optical fiber matrix and light-emitting diodes

Watanabe¹,

Kato²,

Iwasaki³

et al. 2015

Jpn. J. Appl. Phys.

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The direct readability of code marks printed using a new exposure system was investigated. In the new exposure system, code-mark patterns were printed using LEDs as exposure sources and squared optical-fiber ends as code-mark elements. A 10 ' 10 fiber matrix was fabricated, and light emitted from each LED was led to each fiber. Because gaps appeared between the code-mark cells, a long exposure time was adopted, and the gaps between cells were eliminated by giving an overdose of light. After code-mark patterns were stably printed, their readability was investigated using a commercial code-mark reader. It was found that all the printed code marks were readable without errors. In concrete, same 100 identical marks printed on a wafer were readable. Moreover, six kinds of marks were repeatedly detected more than 100 times with no reading errors.

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