2005
DOI: 10.1088/1742-6596/13/1/004
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`Real mechanical profile' — the new approach for nano-measurements

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Cited by 8 publications
(4 citation statements)
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“…An often-used principle for surface observation, with a topography resolution between 0.1 nm and 100 mm [74], is white-light interference microscopy (WLIM). By using chromatic white light (CWLIM), an inline measurement is possible due to the omission of the measurement orthogonal to the surface.…”
Section: Measurement Principles Of Surface Morphologymentioning
confidence: 99%
“…An often-used principle for surface observation, with a topography resolution between 0.1 nm and 100 mm [74], is white-light interference microscopy (WLIM). By using chromatic white light (CWLIM), an inline measurement is possible due to the omission of the measurement orthogonal to the surface.…”
Section: Measurement Principles Of Surface Morphologymentioning
confidence: 99%
“…Issues of particular importance regarding the comparability of the features are: the reproducibility of the sampling schemes (quantity and location of points) and the minimization of distortions typical of the measurement principle (e.g. mechanical dilation caused by the probe tip in tactile measurements [27]). In order to help improve the comparability between the CT and the reference extracted integral features, reconstruction operations can be used.…”
Section: Requirements In Obtaining Task-specific Error Featuresmentioning
confidence: 99%
“…To deal with this issue, a cubic spline interpolation routine was implemented [32]. • Morphological erosion operation: The use of contact elements causes a mechanical modification in the real features similar to a morphological dilation [27].…”
Section: Implementation For the Analysis Of Circular Profilesmentioning
confidence: 99%
“…It represents the real surface measured with a tactile probing system and a correction of the extracted profile with the morphological operation erosion. The deviation of the extracted profile due to the dilation of the real surface by the sphere is eliminated [7]. In order to define new parameters to characterize and specify functional properties of surfaces, a common datum is necessary.…”
Section: New Developed Envelope Systemmentioning
confidence: 99%