2012
DOI: 10.4028/www.scientific.net/ssp.195.269
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Real-Time Analyses of Metal Contaminations in the ppb-Range

Abstract: In high-tech processing even smallest concentrations of metal ions in process media are of the utmost significance because they cause expensive production failures. Currently, cost-intensive equipment, special trained staff and time consuming analyses are necessary to detect these contaminations in order to avoid failures. The Centers of Excellence Nanochem and Sensorics at the University of Applied Sciences Regensburg (owner of patent PCT/EP2010/064833) and their industrial partner Micro-Epsilon GmbH are deve… Show more

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