2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2024
DOI: 10.1109/asmc61125.2024.10545521
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Real-Time Balancing of WIP for Compatible Capacities Across Distant Fab Buildings Using Automated Cross-Location Decisions

Binay Dash,
Detlef Pabst,
Viswa Devan Nair Ramadhasan
et al.
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