Real‐Time Detection of Sub‐ppm Aromatic Compounds in Alcohol by Surface Plasmon Resonance Using Label‐Free Graphene
Sung Hwan Cho,
Jun Min Suh,
Wontaek Kim
et al.
Abstract:The increasing importance of high‐purity isopropyl alcohol (IPA) in semiconductor processing technology has led to a higher demand for technologies capable of detecting impurities in IPA. Although accurate and various impurity detection technologies have been developed, most of them have limitations in real‐time and repeatable detection of impurities. Herein, for the first time, surface plasmon resonance (SPR) sensor was developed utilizing graphene transferred Au film (Au/graphene) to detect sub‐ppm levels of… Show more
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