Real time feedback control of plasma density using a floating probe in semiconductor processing

Oh, Sungho; Lee, Young Kwang; Chung, Chin-Wook

doi:10.1016/j.cap.2012.06.012

Cited by 5 publications

(1 citation statement)

References 14 publications

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“…13) The feasibility of feedback control of plasma density based on continuous FHP measurement has been experimentally verified to achieve advanced plasmaprocess control. 14) Since the FHP method can measure parameters even when there is a dielectric on the probe surface, it has attracted interest as a tool for parameter monitoring in reactive plasmas. To establish reactive plasma monitoring, FHP measurements with dielectric-coated probes were compared with the DC-based probe without the dielectric coating.…”

Section: Introductionmentioning

confidence: 99%

Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas

Kito¹,

Urabe²,

Eriguchi³

2022

Jpn. J. Appl. Phys.

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A floating harmonic probe (FHP) is used to measure the electron energy and ion density in plasmas. It applies an AC voltage to an electrically floated probe and measures harmonic frequency components in the probe current which contain information about the parameters. In this study, we have quantitatively investigated the effects of stray impedances in an FHP measurement system on the calculated parameters. We also discuss the influence of the electron energy distribution function (EEDF) when it deviates from a Maxwellian shape on the FHP measurement. A new approach of multi-harmonic analysis of FHP data (MHA-FHP) is proposed to analyze the electron energy in plasmas with non-Maxwellian EEDFs. The MHA-FHP method has been compared with the conventional FHP and Langmuir probe methods thorough the measurement of low-temperature argon plasmas. Experimental results indicated that the MHA-FHP method can provide the shape of the EEDFs, effective electron temperature, and ion density.

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Section: Introductionmentioning

confidence: 99%

Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas

Kito¹,

Urabe²,

Eriguchi³

2022

Jpn. J. Appl. Phys.

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Phenomenology-based model predictive control of electron density in Ar/SF6 capacitively coupled etch plasma

Ryu

Kwon

Lee

et al. 2022

J. Korean Phys. Soc.

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The sheath effect on the floating harmonic method

2015

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The floating harmonic method biases sinusoidal voltage to a probe sheath, and as its response, harmonic currents can be obtained. These currents can be used to determine the plasma parameters. However, different shapes of probes have different shapes of sheaths that can affect the diagnostic results. However, no research has been done on the sheath effect on the floating harmonic method. Therefore, we investigate the effect of the sheath during floating harmonic diagnostics by comparing cylindrical and planar probes. While the sinusoidal voltages were applied to a probe, because the sheath oscillated, the time variant ion current and their harmonic currents were added to the electron harmonic currents. In the floating harmonic method, the harmonic currents are composed of only the electron harmonic currents. Therefore, the ion harmonic currents affect the diagnostic results. In particular, the electron temperature obtained by the small probe tip was higher than that of the large probe tip. This effect was exacerbated when the ratio of the probe tip radius to the sheath length was smaller.

show abstract

Real time feedback control of plasma density using a floating probe in semiconductor processing

Cited by 5 publications

References 14 publications

Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas

Multi-harmonic analysis in a floating harmonic probe method for diagnostics of electron energy and ion density in low-temperature plasmas

Phenomenology-based model predictive control of electron density in Ar/SF6 capacitively coupled etch plasma

The sheath effect on the floating harmonic method

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