Real-Time Gas Mixture Analysis Using Mid-Infrared Membrane Microcavities

Jin, Tan; Zhou, Junchao; Wang, Zelun; Gutierrez‐Osuna, Ricardo; Ahn, Charles; Hwang, Wonjun; Park, Ken; Lin, Pao Tai

doi:10.1021/acs.analchem.7b03599

Cited by 13 publications

(9 citation statements)

References 40 publications

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“…Stable interferometers can be very small or very large in size, enabling scientific discovery in fields as seemingly unrelated as microcavity sensing [4] and gravitational wave detection [5]. Emerging applications in chemical sensing [6], discrete imaging [7], ultracold chemistry [8,9], and even fundamental physics [10] would benefit immediately from high-performance mirrors at mid-infrared (mid-IR) wavelengths (loosely defined here as the spectral range from 3 µm to 12 µm) to probe new and interesting phenomena with increased precision. A longstanding goal is the development of low-loss mirrors such as those readily available throughout the near-infrared (near-IR) spectral region.…”

Section: Introductionmentioning

confidence: 99%

Mid-infrared interference coatings with excess optical loss below 10 ppm

Winkler

Perner

Truong³

et al. 2021

Optica

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We present high-reflectivity substrate-transferred single-crystal GaAs/AlGaAs interference coatings at a center wavelength of 4.54 µm with record-low excess optical loss below 10 parts per million. These high-performance mirrors are realized via a novel microfabrication process that differs significantly from the production of amorphous multilayers generated via physical vapor deposition processes. This new process enables reduced scatter loss due to the low surface and interfacial roughness, while low background doping in epitaxial growth ensures strongly reduced absorption. We report on a suite of optical measurements, including cavity ring-down, transmittance spectroscopy, and direct absorption tests to reveal the optical losses for a set of prototype mirrors. In the course of these measurements, we observe a unique polarization-orientation-dependent loss mechanism which we attribute to elastic anisotropy of these strained epitaxial multilayers. A future increase in layer count and a corresponding reduction of transmittance will enable optical resonators with a finesse in excess of 100 000 in the mid-infrared spectral region, allowing for advances in high resolution spectroscopy, narrow-linewidth laser stabilization, and ultrasensitive measurements of various light-matter interactions.

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Section: Introductionmentioning

confidence: 99%

Mid-infrared interference coatings with excess optical loss below 10 ppm

Winkler

Perner

Truong³

et al. 2021

Optica

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“…The sensor operation was further developed to achieve simultaneous sensing by integrating the in-line microcavity with two resonant stub microcavities. The in-line cavity provides the wide spectrum centered at 3.8 μm, while the stub cavities resonate at 3.5 μm and 4.5 μm which correspond to the strong absorption bands of CH 4 and N 2 O gases, respectively [22][23], as shown in Fig. 13.…”

Section: Fano Resonance Generationmentioning

confidence: 99%

Silicon-based Mid Infrared On-Chip Gas Sensor Using Fano Resonance of Coupled Plasmonic Microcavities

Sherif

Swillam

2022

Preprint

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Sensing in the mid infra-red spectral range is highly desirable for the detection and monitoring of different gases. We hereby propose a CMOS compatible silicon-based sensor that operates at (3.5-10 μm) within the mid infra-red range. The silicon material is doped to the level that shifts its plasmonic resonance to 3 μm wavelength. The sensor device comprises an in-line rectangular microcavity and a stub microcavity resonator. The resonance frequencies/wavelengths of the two resonators were studied with different design dimensions. When the two resonators are designed to resonate at close frequencies, the interesting Fano resonance with its distinct and sharp line shape is generated due to the interference between the two resonance profiles. Fano resonance is useful for highly sensitive measurements due to its abrupt intensity changing profile. The sensor is studied and analyzed using Finite Difference Element and 2D Finite Difference Time Domain methods. The sensor's performance is characterized by its high sensitivity of 6000 nm/RIU, FOM of 353, and limited insertion loss of 0.45 dB around 6.5 μm operation wavelength. Furthermore, we develop the sensor for simultaneously detecting methane CH4 and nitrous oxide N2O gases at 3.5 μm and 4.5 μm wavelengths, respectively.

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“…Several analytical instrumental techniques are successfully used in the identification of gases. These include infra-red spectroscopy, , mass spectrometry, , Raman spectroscopy, photoacoustic spectroscopy, and using electronic nose systems based on different types of sensor arrays. − Nowadays, electronic nose systems are employed as the primary gas identification means, which typically involve sensor arrays, signal acquisition and processing, pattern recognition, and reference database. The common sensor types utilized in electronic noses are metal oxide semiconductors , and chemiresistive, electrochemical, gravimetric (SAW, BAW, QCM, etc.…”

Section: Introductionmentioning

confidence: 99%

Gas Identification by Simultaneous Permeation through Parallel Membranes: Proof of Concept

Marzouk

Namous

2022

Anal. Chem.

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This paper describes an experimental system for simultaneous permeation of a pressurized test gas through different gas permeable membranes and provides a proof of concept for a novel approach for gas identification/fingerprinting for potential construction of electronic noses. The design, construction, and use of a six-channel system which allows simultaneous gas permeation from a single pressurized gas compartment through six different parallel membranes are presented. The permeated gas is accumulated in confined spaces behind the respective membranes. The rate of gas pressure accumulation behind each membrane is recorded and used as a measure of the gas permeation rate through the membrane. The utilized gas permeable membranes include Teflon AF, silicone rubber, tracketch hydrophilic polycarbonate, track-etch hydrophobic polycarbonate, track-etch polyimide, nanoporous anodic aluminum oxide, zeolite ZSM-5, and zeolite NaY. An analogy between the rate of pressure accumulation of the permeating gas behind the membrane and the charging of an electric capacitor in a single series RC circuit is proposed and thoroughly validated. The simultaneous permeation rates through different membranes demonstrated a very promising potential as characteristic fingerprints for 10 test gases, that is, helium, neon, argon, hydrogen, nitrogen, carbon dioxide, methane, ethane, propane, and ethylene, which are selected as representative examples of mono-, di-, tri-, and polyatomic gases and to include some homologous series as well as to allow testing the potential of the proposed system to discriminate between closely related gases such as ethane and ethylene or carbon dioxide and propane which have almost identical molecular masses. Finally, a preliminary investigation of the possibility of applying the developed gas permeation system for semiquantitative analysis of the CO 2 −N 2 binary mixture is also presented.

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Real-Time Gas Mixture Analysis Using Mid-Infrared Membrane Microcavities

Cited by 13 publications

References 40 publications

Mid-infrared interference coatings with excess optical loss below 10 ppm

Mid-infrared interference coatings with excess optical loss below 10 ppm

Silicon-based Mid Infrared On-Chip Gas Sensor Using Fano Resonance of Coupled Plasmonic Microcavities

Gas Identification by Simultaneous Permeation through Parallel Membranes: Proof of Concept

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