Real-time microscopic 3D shape measurement based on optimized pulse-width-modulation binary fringe projection

Hu, Yan; Chen, Qian; Feng, Shijie; Tao, Tianyang; Li, Hui; Zuo, Chao

doi:10.1088/1361-6501/aa7277

Cited by 22 publications

(6 citation statements)

References 25 publications

(57 reference statements)

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“…The absolute phase value calculated at pixel P based on the captured images should be the same as the absolute phase value predefined at P 0 in the projector space. According to our previous work [28], the relation between the depth z in the world coordinate and the absolute phase Φ is modeled as…”

Section: Phase-height Conversionmentioning

confidence: 99%

Dynamic microscopic 3D shape measurement based on marker-embedded Fourier transform profilometry

Chen

Zhang

et al. 2018

Appl. Opt.

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In recent years, the fringe projection profilometry (FPP) technique has shown great prospects in the field of dynamic 3D measurement of microscopic surface shape. However, under dynamic conditions, it is desirable to use fewer projected patterns to minimize the sensitivity to motion. The commonly used phase-shifting method needs at least three fringe patterns to retrieve the wrapped phase, which depends heavily on the high-speed hardware to alleviate the effect of motion. Besides, to achieve an unambiguous measurement, at least two wrapped phase maps are required to obtain the absolute phase map, resulting in six pattern projections. In this paper, we propose the marker-embedded Fourier transform profilometry (MEFTP), which extends the modified Fourier transform profilometry with two embedded markers suited to assist the phase-unwrapping process. Combining the embedded markers with temporal phase difference information, the absolute phase can be reliably reconstructed with only two projected patterns. Furthermore, since the phase information is only encoded within a single high-frequency fringe, MEFTP is more suitable for measuring fast-moving or surface-changing objects compared with the phase-shifting method. Experiments on both static and dynamic scenes are performed, verifying that our method can achieve an accurate and robust measurement of a vibrating diaphragm at the speed of 200 frames per second.

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Section: Phase-height Conversionmentioning

confidence: 99%

Dynamic microscopic 3D shape measurement based on marker-embedded Fourier transform profilometry

Chen

Zhang

et al. 2018

Appl. Opt.

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“…At the same time, triangulation-based methods can also achieve high measurement accuracy and micro-level resolution with relatively less stringent requirements. For example, laser triangulation [19] and microscopic fringe projection [20][21][22][23] have been developed to achieve high measurement resolution with quite a flexible system setup. Recently, fringe projection techniques have been extensively studied and employed due to their ease of adoption and simple set up.…”

Section: Introductionmentioning

confidence: 99%

Uniaxial three-dimensional phase-shifting profilometry using a dual-telecentric structured light system in micro-scale devices

Zhong

Cui

Hyun

et al. 2020

Meas. Sci. Technol.

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This paper presents a novel method for uniaxial microscopic three-dimensional (3D) profilometry using a structured light system with dual-telecentric lenses in micro-scale devices. Specifically, a telecentric lens can produce an orthographic view of an object and provide the exact size of objects in the x and y directions. An electronically focus-tunable lens attached to the projector rapidly and precisely changes the focal plane of the projected structured patterns, a camera captures the structured patterns from the same perspective and a computational framework analyzes the relationship between the captured structure images and the drive current of the electronically focus-tunable lens to obtain depth information for each pixel. By replacing the normal lens with telecentric lenses, the proposed method dodges perspective error and makes precision measurement easier. We developed a shadow-free coaxial 3D shape measurement system with dual-telecentric lenses that achieved a spatial resolution of approximately 5.86 µm and 4.08 µm root-mean-square error with a depth range of 1200 µm.

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“…However, the measurement speed is limited because of the complex correlation algorithm. Dual frequency absolute phase retrieval methods are also widely used in fast 3D measurements [27,[32][33][34][35][36]. The commonly used phase unwrapping technique projects a coarse unit frequency image and uses the calculated phase to help unwrap the more accurate phase maps [27,37].…”

Section: Introductionmentioning

confidence: 99%

Dynamic 3D measurement of thermal deformation based on geometric-constrained stereo-matching with a stereo microscopic system

Hu¹,

Liang²,

Tao³

et al. 2019

Meas. Sci. Technol.

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In three-dimensional (3D) shape measurement applications based on absolute phase matching in fringe projection profilometry, measurement accuracy can be improved by using denser fringes under the pre-condition that the phase ambiguities can be successfully removed after phase unwrapping. In real-time measurement situations, the number of fringe patterns is limited to reduce motion-induced errors, which does, however, pose more difficulties for the absolute phase recovery of dense fringes. In this paper, we propose a stereo phase matching method that takes advantage of the high accuracy of denser fringes and the high efficiency of using only two different fringe frequencies. The phase map is divided into several sub-areas, and in each sub-area the phase is unwrapped independently. The stereo-matched pixel is selected from the distributed candidates in these sub-areas by geometric constraints. Experimental results show that only five patterns are needed to perform a high-accuracy real-time 3D measurement of the thermally induced deformation of the sample under different heating temperatures based on a telecentric stereo microscopic system.

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Real-time microscopic 3D shape measurement based on optimized pulse-width-modulation binary fringe projection

Cited by 22 publications

References 25 publications

Dynamic microscopic 3D shape measurement based on marker-embedded Fourier transform profilometry

Dynamic microscopic 3D shape measurement based on marker-embedded Fourier transform profilometry

Uniaxial three-dimensional phase-shifting profilometry using a dual-telecentric structured light system in micro-scale devices

Dynamic 3D measurement of thermal deformation based on geometric-constrained stereo-matching with a stereo microscopic system

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