Real time surface morphology analysis of semiconductor materials and devices using 4D interference microscopy

Montgomery, P.C.; Anstotz, F.; Johnson, G.; Kiefer, Renaud

doi:10.1007/s10854-007-9491-2

Cited by 20 publications

(8 citation statements)

References 10 publications

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“…Real-time measurement and high image quality can be achieved using a high-speed CMOS camera and processing in 4D microscopy, giving up to 25 3D surface images per second and 90 nm uncertainty along the optical axis. 47 , 48 This opens up new applications in the measurement of moving or changing surfaces, such as cell mobility, cell growth, or cell reaction to external stimulations from chemicals or drugs.…”

Section: Nanodetection Techniquesmentioning

confidence: 99%

Emerging optical nanoscopy techniques

Montgomery¹,

Leong-Hoï²

2015

NSA

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To face the challenges of modern health care, new imaging techniques with subcellular resolution or detection over wide fields are required. Far field optical nanoscopy presents many new solutions, providing high resolution or detection at high speed. We present a new classification scheme to help appreciate the growing number of optical nanoscopy techniques. We underline an important distinction between superresolution techniques that provide improved resolving power and nanodetection techniques for characterizing unresolved nanostructures. Some of the emerging techniques within these two categories are highlighted with applications in biophysics and medicine. Recent techniques employing wider angle imaging by digital holography and scattering lens microscopy allow superresolution to be achieved for subcellular and even in vivo, imaging without labeling. Nanodetection techniques are divided into four subcategories using contrast, phase, deconvolution, and nanomarkers. Contrast enhancement is illustrated by means of a polarized light-based technique and with strobed phase-contrast microscopy to reveal nanostructures. Very high sensitivity phase measurement using interference microscopy is shown to provide nanometric surface roughness measurement or to reveal internal nanometric structures. Finally, the use of nanomarkers is illustrated with stochastic fluorescence microscopy for mapping intracellular structures. We also present some of the future perspectives of optical nanoscopy.

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Section: Nanodetection Techniquesmentioning

confidence: 99%

Emerging optical nanoscopy techniques

Montgomery¹,

Leong-Hoï²

2015

NSA

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“…Compared to ARMs and high-performance CPUs, FPGAs have the advantage of parallel computing, which can realize the parallel acquisition of eight signals and multi-module parallel computation. Besides, FPGA is often used in the laboratory level signal processing platform, which has real-time performance and can measure multi-dimensional signals at the same time, such as 4D (3D + t) interference microscopy [27]. In consideration of FPGA's low cost and the order of mHz, there are also some smart sensors combining optical principles and FPGA technology to achieve high precision measurement [28].…”

Section: Introductionmentioning

confidence: 99%

An FPGA Platform for Next-Generation Grating Encoders

Han

et al. 2020

Sensors

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Among various nanometer-level displacement measurement methods, grating interferometry-based linear encoders are widely used due to their high robustness, relatively low cost, and compactness. One trend of grating encoders is multi-axis measurement capability for simultaneous precision positioning and small order error motion measurement. However, due to both lack of suitable hardware data processing platform and of a real-time displacement calculation system, meeting the requirements of real-time data processing while maintaining the nanometer order resolutions on all these axes is a challenge. To solve above-mentioned problem, in this paper we introduce a design and experimental validation of a field programmable gate array (FPGA)-cored real-time data processing platform for grating encoders. This platform includes the following functions. First, a front-end photodetector and I/V conversion analog circuit are used to realize basic analog signal filtering, while an eight-channel parallel, 16-bit precision, 200 kSPS maximum acquisition rate Analog-to-digital (ADC) is used to obtain digital signals that are easy to process. Then, an FPGA-based digital signal processing platform is implemented, which can calculate the displacement values corresponding to the phase subdivision signals in parallel and in real time at high speed. Finally, the displacement result is transferred by USB2.0 to the PC in real time through an Universal Asynchronous Receiver/Transmitter (UART) serial port to form a complete real-time displacement calculation system. The experimental results show that the system achieves real-time data processing and displacement result display while meeting the high accuracy of traditional offline data solution methods, which demonstrates the industrial potential and practicality of our absolute two-dimensional grating scale displacement measurement system.

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“…Although CSI showed its performance in the characterization of various kinds of materials [48][49][50][51][52][53][54][55][56][57][58] its use remains relatively unexplored in the field of cement-based materials [1,59,60].…”

Section: Introductionmentioning

confidence: 99%