Real-Time Two-Dimensional Mapping of Relative Local Surface Temperatures with a Thin-Film Sensor Array

Abstract

Dynamic mapping of an object’s local temperature distribution may offer valuable information for failure analysis, system control and improvement. In this letter we present a computerized measurement system which is equipped with a hybrid, low-noise mechanical-electrical multiplexer for real-time two-dimensional (2D) mapping of surface temperatures. We demonstrate the performance of the system on a device embedded with 32 pieces of built-in Cr-Pt thin-film thermocouples arranged in a 4 × 8 matrix. The system can display a continuous 2D mapping movie of relative temperatures with a time interval around 1 s. This technique may find applications in a variety of practical devices and systems.

The Seebeck Coefficient of Sputter Deposited Metallic Thin Films: The Role of Process Conditions

“…Thin film sensing applications, such as thin film thermocouples, can be very attractive for lightweight structures, small devices or applications in need of a high temporal, or spatial resolution as they have a very low mass, reduced dimensions, and a very fast response time [1][2][3][4][5]. For example, thin film thermocouples are used for nanoscale thermometry [6][7][8], for monitoring local temperature distributions on integrated-circuits [9,10], in solid oxide fuel cells [11], and turbine engines [12], or for monitoring sudden temperature changes in cutting tools for machining explosive materials [13]. Furthermore, thin film sensors can be embedded inside composite materials without affecting the structural integrity of the material by their dimensional extent, enabling local and in situ sensing without compromise.…”

Penetrating effect of high-intensity infrared laser pulses through body tissue

“…[38][39][40] Recently, van Nimwegen et al performed temperature monitoring with TCs during Nd:YAG laser treatment on a canine prostate. 25 The rapid response of TCs enabled real-time monitoring of local temperatures with a delay of less than 1 ms. 41,42 Among these techniques, non-invasive thermometry commonly has unavoidable measurement errors caused by patient motion during in vivo applications, and its spatial resolution is limited by the size of pixels, the signal-to-noise ratio, as well as the type of tissue under investigation. Fibre-optic sensors have small size and high spatial resolution, but require complicated analysis tools and their sensitivity is affected by patient respiration.…”

To save half contact pads in 2D mapping of local temperatures with a thermocouple array

“…Real-time 2D mapping of the local temperature distribution on the device surface was performed with a technique reported previously. 29 Fig. 5(b) is the output voltages across the testing zone at times of 60-140 s aer the hot iron was turned on.…”

“…Real-time two dimensional (2D) mapping of local surface temperatures was recorded with a computerized data acquisition system and calculated with Matlab soware. 29 The thermopower of the Cr/Pr TFTC sensors was calibrated on a homemade calibration platform, showing a stable average value of 20.87 AE 0.35 mV K À1 for dozens of sensors under test, corresponding to an accuracy of AE0.02 K. The value of thermopower was found not sensitive to the beam width and length of the TFTCs under test. Fig.…”