Real-time x-ray scattering study on the thermal evolution of interface roughness in CoSi2 formation

Abstract

Long-term stability of a quasiperiodic Ta/Al multilayer: Disintegration at room temperature analyzed by grazing angle x-ray scattering and photoelectron spectroscopy

Formation of cobalt silicides as a buried layer in silicon using high energy heavy ion irradiation

“…Cobalt silicides, having low electrical resistance, show many applications in gates, as a substitute for metallic contact and interconnect in ultra large-scale devices (ULSI) [1][2][3][4][5]. It is known to have three phases, Co 2 Si, CoSi and CoSi 2 and depending on the preparation method, thermal conditions and time used for thermal treatments, the relative amount of each silicide phase may vary.…”

Formation of an extended CoSi2 thin nanohexagons array coherently buried in silicon single crystal

“…9 Previous investigations established that the silicide phase nucleates locally on structural defects of the Si surface during an exothermic reaction, this first step being followed by a self-ordered lateral growth. [10][11][12][13][14][15][16][17][18][19] Wang et al 20 reported the fabrication of micro/nanoscale pits with facile shape, orientation, and size controls on a Si surface via an Au-nanoparticles-assisted vapor transport method. The pit dimensions can be continuously tuned from 70 nm up to several lm.…”

In situ characterization of lattice relaxation of the BaTiO3/LaNiO3 superlattices epitaxially grown on SrTiO3 substrates

“…A combination of X-ray diffraction and reflectivity provides a powerful tool for characterizing the interfacial structure and the surface morphology of thin films [15,16]; the real-time synchrotron radiation measurements are especially useful [15,[17][18][19]. Here we describe the first result in an attempt to explore the lattice relaxation and the effective critical thickness in a short-period epitaxial BTO/LNO superlattice as a function of the number of stacking periods by in situ synchrotron X-ray scattering.…”