Realization of a hybrid-integrated MEMS scanning grating spectrometer

Abstract

Spectrometers and Spectrographs based on scanning grating monochromators are well-established tools for various applications. As new applications came into focus in the last few years, there is a demand for more sophisticated and miniaturized systems. The next generation spectroscopic devices should exhibit very small dimensions and low power consumption, respectively. We have developed a spectroscopic system with a volume of only (15 × 10 × 14) mm3 and a few milliwatts of power consumption that has the potential to fulfill the demands of the upcoming applications. Our approach is based on two dierent strategies. First, we apply resonantly driven MEMS (micro electro mechanical systems). The latest generation of our MEMS scanning grating device has two integrated optical slits and piezoresistive position detection in addition to the already existing miniaturized 1-d scanning grating plate and the electrostatic driving mechanism. Our second strategy is to take advantage of the hybrid integration of optical components by highly sophisticated manufacturing technologies. One objective is the combination of MEMS technology and a planar mounting approach, which potentially facilitate the mass production of spectroscopic systems and a signicant reduction of cost per unit. We present the optical system design as well as the realization of a miniaturized scanning grating spectrometer for the near infrared (NIR) range between 950 nm and 1900 nm with a spectral resolution of 10 nm. The MEMS devices as well as the optical components have been manufactured and rst samples of the spectroscopic measurement device have been mounted by an automated die bonder

A unified spectra analysis workflow for the assessment of microbial contamination of ready-to-eat green salads: Comparative study and application of non-invasive sensors

“…Spectra from the green salad samples were acquired using a NIR spectrometer (SGS1900), developed by Fraunhofer IMPS (Institute für Photonische Mikrosysteme, Dresden, Germany). The NIR spectrometer covers a wavelength range from 1000 to 1900 nm, and it is comprised of a MEMS-based scanning grating for spectral dispersion and an uncooled InGaAs diode for detection (Pügner, Knobbe, Grüger, & Schenk, 2012). A halogen light source providing illumination (in-house constructed by IPMS) was coupled via SMA 905 connector into an Ocean optics Y-shaped fiber bundle (QR400-ANGLE-VIS).…”

Near-Infrared Grating Spectrometer for Mobile Phone Applications

“…The optical surfaces were fabricated by ultra-precision machining. 10 At a later stage, the optics substrate may be manufactured using plastics or glass with replicating processes like micro-injection molding, injection compression molding, or precision molding. It is assumed that a change in manufacturing processes can be facilitated without profoundly revising the overall concept.…”

“…The solution to that challenge is a change from the classic Czerny–Turner design. 10

Figure 2.Czerny–Turner monochromator design in two different configurations: (a) classical setup with tilted grating, (b) modified version with an in-plane grating optimized for micro-assembly, G: the grating; M1: collimating mirror; M2: refocussing mirror; S1: entrance slit; S2: exit slit.

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Control and Signal Acquisition System of Broad-Spectrum Micro-Near-Infrared Spectrometer Based on Dual Single Detector

“…With the rapid development of MOEMS technology, more and more companies and scientific research institutions develop various types of micro-NIR spectrometers based on MOEMS technology, including micro-NIR spectrometers based on FT (Fourier transform) [11][12][13][14][15], micro-NIR spectrometers based on the FP (Fabry-Perot) interferometer [16][17][18], micro-NIR spectrometers based on grating light modulator [19][20][21][22] and micro-NIR spectrometers based on a scanning grating mirror [23][24][25][26][27]. By replacing the traditional fixed diffraction grating with an MOEMS scanning grating mirror in a micro-NIR spectrometer, the cheap InGaAs single detector diode instead of the expensive InGaAs detector array can be used to detect the continuous spectrum.…”