We investigated the structural features of gallium-nitride-porous structures formed using the photo-assisted electrochemical process in the back-side illumination (BSI) mode. The pore diameter and depth were strongly affected by the direction of illumination, where higher controllability was achieved compared with front-side illumination. The spectroscopic measurements revealed that illumination with photon energy below the bulk bandgap plays an important role in pore formation. We propose a formation model by considering the Franz-Keldysh effect that can consistently explain the obtained experimental data in which anodic etching occurs only at the pore tips under the high electric field induced in the depletion region. © 2015 The Electrochemical Society. [DOI: 10.1149/2.0031505eel] All rights reserved.Manuscript submitted December 26, 2014; revised manuscript received February 5, 2015. Published March 14, 2015 Gallium nitride (GaN) is a III/V direct bandgap semiconductor that exhibits high-thermal, chemical, and mechanical stability and is relatively harmless to humans and the environment because it does not contain toxic substances such as arsenic (As). Most notably, GaN is a wide-bandgap material with 3.4 eV of energy, which can be varied from 0.65 to 6.0 eV by alloying it with indium nitride (InN) and aluminum nitride (AlN). On the basis of these excellent properties, various functional devices have been designed, for example ultraviolet (UV) laser diodes, 1 chemical sensors, 2 and photo-electrodes for water splitting.3 The well known challenge to improve these device's performance is to use nanostructures in which the unique optical and electrical properties, such as quantum effects and increased surface sensitivity, appear with a large surface area to volume ratio.Electrochemically formed porous structures, which have been applied for various materials, 4-7 are promising nanostructures for the above-mentioned applications. Many researchers have reported the electrochemical formation of GaN-porous structures.8-10 However, their formation mechanism has not been fully understood. One of the reasons is that the photo-assisted electrochemical process is commonly used in which the formation process becomes more complicated due to the supply of photo-carries generated by illumination. We previously argued that it is difficult with front-side illumination (FSI) to control the structural properties of GaN-porous structures.
11We believe that the optimization of the supply of photo-carriers is one of the key issues for controlling of the structural properties.In this study, we formed GaN-porous structures using the photoassisted electrochemical process in the back-side illumination (BSI) mode, for the first time, and compared with it that in FSI mode. From both experimental and theoretical aspects, we discuss the formation mechanism of GaN-porous structures in BSI mode.The electrochemical setup used in this study is schematically shown in Figure 1. A custom-made cell equipped with a crystal window and Indium Tin Oxi...